{"id":14,"date":"2024-09-15T18:25:01","date_gmt":"2024-09-15T10:25:01","guid":{"rendered":"https:\/\/aluminiumnitride.com\/?p=14"},"modified":"2024-12-21T20:17:57","modified_gmt":"2024-12-21T12:17:57","slug":"%e1%83%90%e1%83%9a%e1%83%a3%e1%83%9b%e1%83%98%e1%83%9c%e1%83%98%e1%83%a1-%e1%83%9c%e1%83%98%e1%83%a2%e1%83%a0%e1%83%98%e1%83%93%e1%83%98","status":"publish","type":"post","link":"https:\/\/aluminiumnitride.com\/ka\/%e1%83%90%e1%83%9a%e1%83%a3%e1%83%9b%e1%83%98%e1%83%9c%e1%83%98%e1%83%a1-%e1%83%9c%e1%83%98%e1%83%a2%e1%83%a0%e1%83%98%e1%83%93%e1%83%98\/","title":{"rendered":"\u10d0\u10da\u10e3\u10db\u10d8\u10dc\u10d8\u10e1 \u10dc\u10d8\u10e2\u10e0\u10d8\u10d3\u10d8"},"content":{"rendered":"

\u10d0\u10da\u10e3\u10db\u10d8\u10dc\u10d8\u10e1 \u10dc\u10d8\u10e2\u10e0\u10d8\u10d3\u10d8 \u10d3\u10d0 \u10d0\u10da\u10e3\u10db\u10d8\u10dc\u10d8\u10e1 \u10dc\u10d8\u10e2\u10e0\u10d8\u10d3\u10d8<\/h1>\n

\u10d0\u10da\u10e3\u10db\u10d8\u10dc\u10d8\u10e1 \u10dc\u10d8\u10e2\u10e0\u10d8\u10d3\u10d8 (AlN) \u10d7\u10d4\u10e0\u10db\u10e3\u10da\u10d8 \u10d2\u10d0\u10db\u10dd\u10e7\u10d4\u10dc\u10d4\u10d1\u10d8\u10e1\u10d7\u10d5\u10d8\u10e1 \u10d8\u10d3\u10d4\u10d0\u10da\u10e3\u10e0\u10d8 \u10db\u10d0\u10e1\u10d0\u10da\u10d0\u10d0. \u10db\u10d0\u10e6\u10d0\u10da\u10d8 \u10d7\u10d1\u10dd\u10d2\u10d0\u10db\u10e2\u10d0\u10e0\u10dd\u10d1\u10d8\u10e1, \u10d8\u10d6\u10dd\u10da\u10d0\u10ea\u10d8\u10d8\u10e1 \u10d7\u10d5\u10d8\u10e1\u10d4\u10d1\u10d4\u10d1\u10d8\u10e1\u10d0 \u10d3\u10d0 \u10d7\u10d1\u10e3\u10e0\u10d8 \u10d2\u10d0\u10e4\u10d0\u10e0\u10d7\u10dd\u10d4\u10d1\u10d8\u10e1 \u10d3\u10d0\u10d1\u10d0\u10da\u10d8 \u10d9\u10dd\u10d4\u10e4\u10d8\u10ea\u10d8\u10d4\u10dc\u10e2\u10d8\u10e1 \u10ec\u10e7\u10d0\u10da\u10dd\u10d1\u10d8\u10d7, AlN \u10db\u10d8\u10db\u10d6\u10d8\u10d3\u10d5\u10d4\u10da\u10d8 \u10db\u10d0\u10e1\u10d0\u10da\u10d0\u10d0, \u10e0\u10dd\u10db\u10d4\u10da\u10d8\u10ea \u10dc\u10d0\u10ee\u10d4\u10d5\u10d0\u10e0\u10d2\u10d0\u10db\u10e2\u10d0\u10e0\u10d4\u10d1\u10d8\u10e1 \u10d8\u10dc\u10d3\u10e3\u10e1\u10e2\u10e0\u10d8\u10d0\u10e8\u10d8 \u10d1\u10d4\u10e0\u10d8\u10da\u10d8\u10e1 \u10dd\u10e5\u10e1\u10d8\u10d3\u10d8\u10e1 \u10e3\u10e1\u10d0\u10e4\u10e0\u10d7\u10ee\u10dd \u10d0\u10da\u10e2\u10d4\u10e0\u10dc\u10d0\u10e2\u10d8\u10d5\u10d0\u10e1 \u10ec\u10d0\u10e0\u10db\u10dd\u10d0\u10d3\u10d2\u10d4\u10dc\u10e1 \u10d3\u10d0 \u10d0\u10d3\u10d5\u10d8\u10da\u10d0\u10d3 \u10d3\u10d0\u10e1\u10d0\u10db\u10e3\u10e8\u10d0\u10d5\u10d4\u10d1\u10d4\u10da\u10d8\u10d0.<\/p>\n

AlN-\u10d8\u10e1 \u10d3\u10d0\u10db\u10e3\u10e8\u10d0\u10d5\u10d4\u10d1\u10d0 \u10e8\u10d4\u10e1\u10d0\u10eb\u10da\u10d4\u10d1\u10d4\u10da\u10d8\u10d0 \u10db\u10d8\u10e1\u10d8 \u10db\u10ec\u10d5\u10d0\u10dc\u10d4, \u10d1\u10d8\u10e1\u10d9\u10d5\u10d8\u10e2\u10d8\u10e1\u10d4\u10d1\u10e0\u10d8 \u10d0\u10dc \u10e1\u10e0\u10e3\u10da\u10d0\u10d3 \u10e1\u10d8\u10dc\u10e2\u10d4\u10e0\u10d4\u10d1\u10e3\u10da\u10d8 \u10db\u10d3\u10d2\u10dd\u10db\u10d0\u10e0\u10d4\u10dd\u10d1\u10d0\u10e8\u10d8. \u10d7\u10e3\u10db\u10ea\u10d0, \u10e1\u10e0\u10e3\u10da\u10d0\u10d3 \u10e1\u10d8\u10dc\u10e2\u10d4\u10e0\u10e3\u10da \u10db\u10d0\u10e1\u10d0\u10da\u10d0\u10e1 \u10db\u10d9\u10d0\u10ea\u10e0\u10d8 \u10d3\u10d0\u10e8\u10d5\u10d4\u10d1\u10d4\u10d1\u10d8\u10e1 \u10d3\u10d0\u10e1\u10d0\u10ea\u10d0\u10d5\u10d0\u10d3 \u10d3\u10d0\u10db\u10d0\u10e2\u10d4\u10d1\u10d8\u10d7\u10d8 \u10d3\u10e0\u10dd \u10d3\u10d0 \u10dd\u10e1\u10e2\u10d0\u10e2\u10dd\u10d1\u10d0 \u10e1\u10ed\u10d8\u10e0\u10d3\u10d4\u10d1\u10d0.<\/p>\n

\u10db\u10d0\u10e6\u10d0\u10da\u10d8 \u10d7\u10d1\u10dd\u10d2\u10d0\u10db\u10e2\u10d0\u10e0\u10dd\u10d1\u10d0<\/h2>\n

\u10d0\u10da\u10e3\u10db\u10d8\u10dc\u10d8\u10e1 \u10dc\u10d8\u10e2\u10e0\u10d8\u10d3\u10d8\u10e1 \u10e8\u10d4\u10e1\u10d0\u10dc\u10d8\u10e8\u10dc\u10d0\u10d5\u10d8 \u10d7\u10d1\u10dd\u10d2\u10d0\u10db\u10e2\u10d0\u10e0\u10dd\u10d1\u10d0 \u10db\u10d0\u10e1 \u10d4\u10da\u10d4\u10e5\u10e2\u10e0\u10dd\u10dc\u10e3\u10da \u10db\u10dd\u10ec\u10e7\u10dd\u10d1\u10d8\u10da\u10dd\u10d1\u10d4\u10d1\u10e8\u10d8 \u10e1\u10d8\u10d7\u10d1\u10dd\u10e1 \u10d2\u10d0\u10e4\u10e0\u10e5\u10d5\u10d4\u10d5\u10d8\u10e1\u10d7\u10d5\u10d8\u10e1 \u10e1\u10d0\u10e3\u10d9\u10d4\u10d7\u10d4\u10e1\u10dd \u10db\u10d0\u10e1\u10d0\u10da\u10d0\u10d3 \u10d0\u10e5\u10ea\u10d4\u10d5\u10e1. \u10d7\u10d0\u10dc\u10d0\u10db\u10d4\u10d3\u10e0\u10dd\u10d5\u10d4 \u10d4\u10da\u10d4\u10e5\u10e2\u10e0\u10dd\u10dc\u10d8\u10d9\u10d0 \u10d3\u10d8\u10d3 \u10e0\u10d0\u10dd\u10d3\u10d4\u10dc\u10dd\u10d1\u10d8\u10d7 \u10e1\u10d8\u10d7\u10d1\u10dd\u10e1 \u10d2\u10d0\u10db\u10dd\u10d8\u10db\u10e3\u10e8\u10d0\u10d5\u10d4\u10d1\u10e1, \u10e0\u10dd\u10db\u10d4\u10da\u10d8\u10ea \u10e1\u10ec\u10e0\u10d0\u10e4\u10d0\u10d3 \u10e3\u10dc\u10d3\u10d0 \u10d2\u10d0\u10e4\u10e0\u10e5\u10d5\u10d4\u10e3\u10da \u10d8\u10e5\u10dc\u10d0\u10e1; \u10d0\u10da\u10e3\u10db\u10d8\u10dc\u10d8\u10e1 \u10dc\u10d8\u10e2\u10e0\u10d8\u10d3\u10d8\u10e1 \u10d8\u10d6\u10dd\u10da\u10d0\u10ea\u10d8\u10d8\u10e1 \u10d7\u10d5\u10d8\u10e1\u10d4\u10d1\u10d4\u10d1\u10d8 \u10ee\u10d4\u10da\u10e1 \u10e3\u10ec\u10e7\u10dd\u10d1\u10e1 \u10d2\u10d0\u10d3\u10d0\u10ee\u10e3\u10e0\u10d4\u10d1\u10d8\u10e1 \u10d7\u10d0\u10d5\u10d8\u10d3\u10d0\u10dc \u10d0\u10ea\u10d8\u10da\u10d4\u10d1\u10d0\u10e1, \u10e0\u10d0\u10ea \u10d3\u10e0\u10dd\u10d7\u10d0 \u10d2\u10d0\u10dc\u10db\u10d0\u10d5\u10da\u10dd\u10d1\u10d0\u10e8\u10d8 \u10d6\u10e0\u10d3\u10d8\u10e1 \u10e1\u10d0\u10d8\u10db\u10d4\u10d3\u10dd\u10dd\u10d1\u10d0\u10e1 \u10d3\u10d0 \u10d0\u10ee\u10d0\u10dc\u10d2\u10e0\u10eb\u10da\u10d8\u10d5\u10d4\u10d1\u10e1 \u10d9\u10dd\u10db\u10de\u10dd\u10dc\u10d4\u10dc\u10e2\u10d4\u10d1\u10d8\u10e1 \u10d4\u10e5\u10e1\u10de\u10da\u10e3\u10d0\u10e2\u10d0\u10ea\u10d8\u10d8\u10e1 \u10d5\u10d0\u10d3\u10d0\u10e1.<\/p>\n

AlN-\u10d8\u10e1 \u10e1\u10d8\u10db\u10d9\u10d5\u10e0\u10d8\u10d5\u10d4\u10d0 3.26 \u10d2\/\u10e1\u10db\u00b3, \u10ee\u10dd\u10da\u10dd \u10d7\u10d1\u10dd\u10d2\u10d0\u10db\u10e2\u10d0\u10e0\u10dd\u10d1\u10d0 \u2014 170 \u10d5\u10e2\/(\u10db-\u10d9), \u10e0\u10d0\u10ea \u10d0\u10da\u10e3\u10db\u10d8\u10dc\u10d8\u10e1 \u10dd\u10e5\u10e1\u10d8\u10d3\u10d6\u10d4 \u10ee\u10e3\u10d7\u10ef\u10d4\u10e0 \u10db\u10d4\u10e2\u10d8\u10d0 \u10d3\u10d0 \u10d7\u10d1\u10dd\u10d2\u10d0\u10db\u10e2\u10d0\u10e0\u10dd\u10d1\u10d8\u10d7 \u10d1\u10d4\u10e0\u10d8\u10da\u10d8\u10e1 \u10dd\u10e5\u10e1\u10d8\u10d3\u10e1 \u10e3\u10d0\u10ee\u10da\u10dd\u10d5\u10d3\u10d4\u10d1\u10d0. \u10d7\u10e3\u10db\u10ea\u10d0, \u10e1\u10d0\u10db\u10ec\u10e3\u10ee\u10d0\u10e0\u10dd\u10d3, \u10e1\u10d8\u10dc\u10e2\u10d4\u10e0\u10d8\u10e0\u10d4\u10d1\u10d8\u10e1 \u10de\u10e0\u10dd\u10ea\u10d4\u10e1\u10e8\u10d8 \u10e1\u10d0\u10ec\u10e7\u10d8\u10e1 \u10e4\u10ee\u10d5\u10dc\u10d8\u10da\u10d4\u10d1\u10e8\u10d8 \u10d0\u10e0\u10e1\u10d4\u10d1\u10e3\u10da\u10d8 \u10df\u10d0\u10dc\u10d2\u10d1\u10d0\u10d3\u10d8\u10e1 \u10e3\u10db\u10ec\u10d8\u10d9\u10d5\u10dd\u10d4\u10d1\u10d8\u10e1 \u10d2\u10d0\u10db\u10dd AlN-\u10d8\u10e1 \u10d7\u10d1\u10dd\u10d2\u10d0\u10db\u10e2\u10d0\u10e0\u10dd\u10d1\u10d8\u10e1 \u10e8\u10d4\u10db\u10ea\u10d8\u10e0\u10d4\u10d1\u10d0\u10d0 \u10e8\u10d4\u10e1\u10d0\u10eb\u10da\u10d4\u10d1\u10d4\u10da\u10d8.<\/p>\n

\u10d7\u10d4\u10e0\u10db\u10e3\u10da\u10d8 \u10d2\u10d0\u10db\u10e2\u10d0\u10e0\u10dd\u10d1\u10d8\u10e1 \u10d2\u10d0\u10e1\u10d0\u10e3\u10db\u10ef\u10dd\u10d1\u10d4\u10e1\u10d4\u10d1\u10da\u10d0\u10d3, \u10e4\u10ee\u10d5\u10dc\u10d8\u10da\u10d8 \u10d8\u10e0\u10d4\u10d5\u10d0 \u10e1\u10d8\u10dc\u10e2\u10d4\u10e0\u10d8\u10e0\u10d4\u10d1\u10d8\u10e1 \u10ee\u10d4\u10da\u10e8\u10d4\u10db\u10ec\u10e7\u10dd\u10d1 \u10e1\u10d0\u10e8\u10e3\u10d0\u10da\u10d4\u10d1\u10d4\u10d1\u10d7\u10d0\u10dc, \u10e0\u10dd\u10d2\u10dd\u10e0\u10d8\u10ea\u10d0\u10d0 CaO \u10d3\u10d0 Y2O3. \u10e8\u10d4\u10db\u10d3\u10d4\u10d2 \u10dc\u10d0\u10ec\u10d8\u10da\u10d0\u10d9\u10d4\u10d1\u10d8 \u10db\u10d0\u10e6\u10d0\u10da\u10d8 \u10ec\u10d0\u10e0\u10db\u10d0\u10d3\u10dd\u10d1\u10d8\u10e1 \u10e1\u10d0\u10e4\u10e5\u10d5\u10d0\u10d5\u10d8\u10e1 \u10d2\u10d0\u10db\u10dd\u10e7\u10d4\u10dc\u10d4\u10d1\u10d8\u10d7 \u10d8\u10e4\u10e5\u10d5\u10d4\u10d1\u10d0 \u10e3\u10da\u10e2\u10e0\u10d0\u10ec\u10d5\u10e0\u10d8\u10da \u10d6\u10dd\u10db\u10d0\u10db\u10d3\u10d4, \u10e0\u10d0\u10ea \u10e3\u10e4\u10e0\u10dd \u10db\u10ed\u10d8\u10d3\u10e0\u10dd\u10d3 \u10d3\u10d0\u10de\u10e0\u10d4\u10e1\u10d8\u10da\u10d8 \u10d9\u10d4\u10e0\u10d0\u10db\u10d8\u10d9\u10e3\u10da\u10d8 \u10e1\u10e2\u10e0\u10e3\u10e5\u10e2\u10e3\u10e0\u10d4\u10d1\u10d8\u10e1 \u10e8\u10d4\u10e5\u10db\u10dc\u10d8\u10e1 \u10e1\u10d0\u10e8\u10e3\u10d0\u10da\u10d4\u10d1\u10d0\u10e1 \u10d8\u10eb\u10da\u10d4\u10d5\u10d0. \u10d0\u10db\u10d2\u10d5\u10d0\u10e0\u10d0\u10d3 \u10db\u10d8\u10d8\u10e6\u10d4\u10d1\u10d0 \u10db\u10d9\u10d5\u10e0\u10d8\u10d5\u10d8 \u10d9\u10d4\u10e0\u10d0\u10db\u10d8\u10d9\u10e3\u10da\u10d8 \u10e1\u10e2\u10e0\u10e3\u10e5\u10e2\u10e3\u10e0\u10d4\u10d1\u10d8, \u10e0\u10dd\u10db\u10da\u10d4\u10d1\u10e1\u10d0\u10ea \u10e8\u10d4\u10e1\u10d0\u10dc\u10d8\u10e8\u10dc\u10d0\u10d5\u10d8 \u10d7\u10d1\u10dd\u10d8\u10d6\u10dd\u10da\u10d0\u10ea\u10d8\u10d8\u10e1 \u10d7\u10d5\u10d8\u10e1\u10d4\u10d1\u10d4\u10d1\u10d8 \u10d2\u10d0\u10d0\u10e9\u10dc\u10d8\u10d0.<\/p>\n

\u10d0\u10da\u10e3\u10db\u10d8\u10dc\u10d8\u10e1 \u10dc\u10d8\u10e2\u10e0\u10d8\u10d3\u10d8\u10e1 \u10e3\u10db\u10d0\u10e6\u10da\u10d4\u10e1\u10d8 \u10d7\u10d4\u10e0\u10db\u10e3\u10da\u10d8 \u10d3\u10d0 \u10d4\u10da\u10d4\u10e5\u10e2\u10e0\u10e3\u10da\u10d8 \u10d8\u10d6\u10dd\u10da\u10d0\u10ea\u10d8\u10d0 \u10db\u10d0\u10e1 \u10e8\u10d4\u10e1\u10d0\u10dc\u10d8\u10e8\u10dc\u10d0\u10d5 \u10db\u10d0\u10e1\u10d0\u10da\u10d0\u10d3 \u10d0\u10e5\u10ea\u10d4\u10d5\u10e1 MEMS-\u10d0\u10de\u10da\u10d8\u10d9\u10d0\u10ea\u10d8\u10d4\u10d1\u10d8\u10e1\u10d7\u10d5\u10d8\u10e1, \u10db\u10d0\u10d7 \u10e8\u10dd\u10e0\u10d8\u10e1 \u10db\u10d0\u10e6\u10d0\u10da\u10d8 \u10e1\u10d8\u10ee\u10e8\u10d8\u10e0\u10d8\u10e1 \u10e4\u10d8\u10da\u10e2\u10e0\u10d4\u10d1\u10d8\u10e1\u10d7\u10d5\u10d8\u10e1, \u10d4\u10dc\u10d4\u10e0\u10d2\u10d8\u10d8\u10e1 \u10db\u10dd\u10db\u10de\u10dd\u10d5\u10d4\u10d1\u10da\u10d4\u10d1\u10d8\u10e1\u10d0 \u10d3\u10d0 \u10e3\u10da\u10e2\u10e0\u10d0\u10d1\u10d2\u10d4\u10e0\u10d8\u10d7\u10d8 \u10d2\u10d0\u10d3\u10d0\u10db\u10ea\u10d4\u10db\u10d4\u10d1\u10d8\u10e1\u10d7\u10d5\u10d8\u10e1. \u10d2\u10d0\u10e0\u10d3\u10d0 \u10d0\u10db\u10d8\u10e1\u10d0, \u10db\u10d8\u10e1\u10d8 \u10e4\u10d0\u10e0\u10d7\u10dd \u10d2\u10d0\u10db\u10e2\u10d0\u10e0\u10dd\u10d1\u10d8\u10e1 \u10d6\u10dd\u10da\u10d8, \u10e8\u10d4\u10d5\u10e1\u10d4\u10d1\u10d8\u10d7\u10d8 \u10db\u10d4\u10e2\u10d0\u10da\u10dd\u10e5\u10e1\u10d8\u10d3\u10e3\u10e0\u10d8 \u10dc\u10d0\u10ee\u10d4\u10d5\u10d0\u10e0\u10d2\u10d0\u10db\u10e2\u10d0\u10e0\u10d4\u10d1\u10d8\u10e1 (CMOS) \u10e2\u10d4\u10e5\u10dc\u10dd\u10da\u10dd\u10d2\u10d8\u10d0\u10e1\u10d7\u10d0\u10dc \u10d7\u10d0\u10d5\u10e1\u10d4\u10d1\u10d0\u10d3\u10dd\u10d1\u10d0 \u10d3\u10d0 \u10e3\u10db\u10d0\u10e6\u10da\u10d4\u10e1\u10d8 \u10de\u10d8\u10d4\u10d6\u10dd\u10d4\u10da\u10d4\u10e5\u10e2\u10e0\u10e3\u10da\u10d8 \u10d7\u10d5\u10d8\u10e1\u10d4\u10d1\u10d4\u10d1\u10d8 \u10d0\u10db \u10db\u10d0\u10e1\u10d0\u10da\u10d0\u10e1 \u10e8\u10d4\u10e1\u10d0\u10e4\u10d4\u10e0\u10d8\u10e1\u10e1 \u10ee\u10d3\u10d8\u10e1 \u10db\u10e0\u10d0\u10d5\u10d0\u10da\u10d8 MEMS \u10db\u10dd\u10ec\u10e7\u10dd\u10d1\u10d8\u10da\u10dd\u10d1\u10d8\u10e1\u10d7\u10d5\u10d8\u10e1, \u10e0\u10dd\u10d2\u10dd\u10e0\u10d8\u10ea\u10d0\u10d0 \u10db\u10d0\u10e6\u10d0\u10da\u10d8 \u10e1\u10d8\u10ee\u10e8\u10d8\u10e0\u10d8\u10e1 \u10e4\u10d8\u10da\u10e2\u10e0\u10d4\u10d1\u10d8, \u10d4\u10dc\u10d4\u10e0\u10d2\u10d8\u10d8\u10e1 \u10db\u10dd\u10db\u10de\u10dd\u10d5\u10d4\u10d1\u10da\u10d4\u10d1\u10d8 \u10d3\u10d0 \u10e3\u10da\u10e2\u10e0\u10d0\u10d1\u10d2\u10d4\u10e0\u10d8\u10d7\u10d8 \u10d2\u10d0\u10d3\u10d0\u10db\u10ea\u10d4\u10db\u10d4\u10d1\u10d8. \u10d0\u10db\u10d0\u10e1\u10d7\u10d0\u10dc, \u10db\u10d8\u10e1\u10d8 \u10db\u10d4\u10e5\u10d0\u10dc\u10d8\u10d9\u10e3\u10e0\u10d8 \u10d7\u10d5\u10d8\u10e1\u10d4\u10d1\u10d4\u10d1\u10d8 \u10db\u10d0\u10e1 \u10db\u10d0\u10e0\u10e2\u10d8\u10d5\u10d0\u10d3 \u10e4\u10dd\u10e0\u10db\u10d8\u10e0\u10d4\u10d1\u10d8\u10e1 \u10e1\u10d0\u10e8\u10e3\u10d0\u10da\u10d4\u10d1\u10d0\u10e1 \u10d0\u10eb\u10da\u10d4\u10d5\u10e1.<\/p>\n

\u10db\u10d0\u10e6\u10d0\u10da\u10d8 \u10d4\u10da\u10d4\u10e5\u10e2\u10e0\u10e3\u10da\u10d8 \u10d8\u10d6\u10dd\u10da\u10d0\u10ea\u10d8\u10d0<\/h2>\n

\u10d0\u10da\u10e3\u10db\u10d8\u10dc\u10d8\u10e1 \u10dc\u10d8\u10e2\u10e0\u10d8\u10d3\u10d8 \u10d0\u10e0\u10d0\u10e2\u10dd\u10e5\u10e1\u10d8\u10d9\u10e3\u10e0\u10d8 \u10d9\u10d4\u10e0\u10d0\u10db\u10d8\u10d9\u10e3\u10da\u10d8 \u10db\u10d0\u10e1\u10d0\u10da\u10d0\u10d0, \u10e0\u10dd\u10db\u10d4\u10da\u10d8\u10ea \u10d2\u10d0\u10db\u10dd\u10d8\u10e0\u10e9\u10d4\u10d5\u10d0 \u10e8\u10d4\u10e1\u10d0\u10dc\u10d8\u10e8\u10dc\u10d0\u10d5\u10d8 \u10d7\u10d1\u10dd\u10d2\u10d0\u10db\u10e2\u10d0\u10e0\u10dd\u10d1\u10d8\u10d7, \u10d4\u10da\u10d4\u10e5\u10e2\u10e0\u10e3\u10da \u10d8\u10d6\u10dd\u10da\u10d0\u10ea\u10d8\u10d0\u10e1\u10d0 \u10d3\u10d0 \u10d3\u10d0\u10d1\u10d0\u10da\u10d8 \u10d2\u10d0\u10e4\u10d0\u10e0\u10d7\u10dd\u10d4\u10d1\u10d8\u10e1 \u10d7\u10d5\u10d8\u10e1\u10d4\u10d1\u10d4\u10d1\u10d8\u10d7 \u2013 \u10d8\u10d3\u10d4\u10d0\u10da\u10e3\u10e0\u10d8\u10d0 \u10d3\u10d8\u10d3\u10d8 \u10db\u10d0\u10e1\u10e8\u10e2\u10d0\u10d1\u10d8\u10e1 \u10d8\u10dc\u10e2\u10d4\u10d2\u10e0\u10d8\u10e0\u10d4\u10d1\u10e3\u10da\u10d8 \u10e1\u10e5\u10d4\u10db\u10d4\u10d1\u10d8\u10e1 \u10e1\u10d8\u10d7\u10d1\u10dd\u10e1 \u10d2\u10d0\u10db\u10e4\u10e0\u10e5\u10d5\u10d4\u10d5\u10d8 \u10e1\u10e3\u10d1\u10e1\u10e2\u10e0\u10d0\u10e2\u10d4\u10d1\u10d8\u10e1\u10d0 \u10d3\u10d0 \u10e8\u10d4\u10e4\u10e3\u10d7\u10d5\u10d8\u10e1\u10d7\u10d5\u10d8\u10e1. \u10d2\u10d0\u10e0\u10d3\u10d0 \u10d0\u10db\u10d8\u10e1\u10d0, \u10d4\u10e1 \u10d0\u10e0\u10d0\u10e2\u10dd\u10e5\u10e1\u10d8\u10d9\u10e3\u10e0\u10d8 \u10db\u10d0\u10e1\u10d0\u10da\u10d0 \u10db\u10d3\u10d2\u10e0\u10d0\u10d3\u10d8\u10d0 \u10de\u10da\u10d0\u10d6\u10db\u10e3\u10e0\u10d8 \u10d4\u10e0\u10dd\u10d6\u10d8\u10d8\u10e1\u10d0 \u10d3\u10d0 \u10e5\u10d8\u10db\u10d8\u10e3\u10e0\u10d8 \u10d9\u10dd\u10e0\u10dd\u10d6\u10d8\u10d8\u10e1 \u10db\u10d8\u10db\u10d0\u10e0\u10d7 \u10d3\u10d0 \u10d0\u10d3\u10d5\u10d8\u10da\u10d0\u10d3 \u10d4\u10e5\u10d5\u10d4\u10db\u10d3\u10d4\u10d1\u10d0\u10e0\u10d4\u10d1\u10d0 \u10db\u10d4\u10e2\u10d0\u10da\u10e3\u10e0 \u10d3\u10d0\u10e4\u10d0\u10e0\u10d5\u10d0\u10e1, \u10e8\u10d4\u10dc\u10d3\u10dd\u10d1\u10d0\u10e1 \u10d0\u10dc \u10d0\u10d3\u10d2\u10d8\u10da\u10d6\u10d4 \u10e8\u10d4\u10d3\u10e3\u10e6\u10d4\u10d1\u10d0\u10e1 \u2013 \u10d0\u10db\u10d0\u10e1\u10d7\u10d0\u10dc, \u10db\u10d8\u10e1\u10d8 Al-N \u10d1\u10db\u10e3\u10da\u10d4\u10d1\u10d8 \u10e3\u10d6\u10e0\u10e3\u10dc\u10d5\u10d4\u10da\u10e7\u10dd\u10e4\u10e1 \u10d2\u10d0\u10db\u10dd\u10e0\u10e9\u10d4\u10e3\u10da \u10db\u10d3\u10d2\u10e0\u10d0\u10d3\u10dd\u10d1\u10d0\u10e1 \u10d9\u10dd\u10e0\u10dd\u10d6\u10d8\u10d8\u10e1, \u10df\u10d0\u10dc\u10d2\u10d5\u10d8\u10e1\u10d0 \u10d3\u10d0 \u10d3\u10d0\u10e6\u10da\u10d8\u10da\u10dd\u10d1\u10d8\u10e1 \u10db\u10d8\u10db\u10d0\u10e0\u10d7.<\/p>\n

\u10d9\u10d4\u10e0\u10d0\u10db\u10d8\u10d9\u10d0\u10e1 \u10d0\u10da\u10e3\u10db\u10d8\u10dc\u10d8\u10e1 \u10dd\u10e5\u10e1\u10d8\u10d3\u10d8\u10e1\u10d0 \u10d3\u10d0 \u10d1\u10d4\u10e0\u10d8\u10da\u10d8\u10e1 \u10dd\u10e5\u10e1\u10d8\u10d3\u10d8\u10e1 \u10d0\u10dc\u10d0\u10da\u10dd\u10d2\u10d4\u10d1\u10d7\u10d0\u10dc \u10e8\u10d4\u10d3\u10d0\u10e0\u10d4\u10d1\u10d8\u10d7 \u10e3\u10e4\u10e0\u10dd \u10db\u10d0\u10e6\u10d0\u10da\u10d8 \u10d7\u10d1\u10dd\u10d2\u10d0\u10db\u10e2\u10d0\u10e0\u10dd\u10d1\u10d0 \u10d3\u10d0 \u10e1\u10d8\u10db\u10d9\u10d5\u10e0\u10d8\u10d5\u10d4 \u10d0\u10e5\u10d5\u10e1, \u10ee\u10dd\u10da\u10dd \u10db\u10d0\u10e6\u10d0\u10da\u10e2\u10d4\u10db\u10de\u10d4\u10e0\u10d0\u10e2\u10e3\u10e0\u10e3\u10da\u10d8 \u10d2\u10d0\u10db\u10dd\u10e7\u10d4\u10dc\u10d4\u10d1\u10d8\u10e1\u10d7\u10d5\u10d8\u10e1 \u10d0\u10da\u10e3\u10db\u10d8\u10dc\u10d8\u10e1 \u10dd\u10e5\u10e1\u10d8\u10d3\u10d6\u10d4 \u10d3\u10d0\u10d1\u10d0\u10da\u10d8 \u10d2\u10d0\u10e4\u10d0\u10e0\u10d7\u10dd\u10d4\u10d1\u10d8\u10e1 \u10d9\u10dd\u10d4\u10e4\u10d8\u10ea\u10d8\u10d4\u10dc\u10e2\u10d8 \u10d3\u10d0 \u10db\u10d4\u10e2\u10d0\u10da\u10d4\u10d1\u10d8\u10e1 \u10e3\u10db\u10d4\u10e2\u10d4\u10e1\u10dd\u10d1\u10d0\u10d6\u10d4 \u10e3\u10d9\u10d4\u10d7\u10d4\u10e1\u10d8 \u10de\u10da\u10d0\u10d6\u10db\u10e3\u10e0\u10d8 \u10d4\u10e0\u10dd\u10d6\u10d8\u10d8\u10e1\u10d0\u10d3\u10db\u10d8 \u10db\u10d3\u10d2\u10e0\u10d0\u10d3\u10dd\u10d1\u10d0 \u10d0\u10ee\u10d0\u10e1\u10d8\u10d0\u10d7\u10d4\u10d1\u10e1.<\/p>\n

\u10d0\u10da\u10e3\u10db\u10d8\u10dc\u10d8\u10e1 \u10dc\u10d8\u10e2\u10e0\u10d8\u10d3\u10d8 \u10d2\u10d0\u10db\u10dd\u10d8\u10e0\u10e9\u10d4\u10d5\u10d0, \u10e0\u10dd\u10d2\u10dd\u10e0\u10ea \u10db\u10d8\u10db\u10d6\u10d8\u10d3\u10d5\u10d4\u10da\u10d8 \u10d5\u10d0\u10e0\u10d8\u10d0\u10dc\u10e2\u10d8 \u10d4\u10da\u10d4\u10e5\u10e2\u10e0\u10dd\u10dc\u10e3\u10da \u10d2\u10d0\u10db\u10dd\u10e7\u10d4\u10dc\u10d4\u10d1\u10d4\u10d1\u10e8\u10d8 \u10db\u10d8\u10e1\u10d8 \u10d3\u10d0\u10d1\u10d0\u10da\u10d8 \u10d7\u10d4\u10e0\u10db\u10e3\u10da\u10d8 \u10d2\u10d0\u10e4\u10d0\u10e0\u10d7\u10dd\u10d4\u10d1\u10d8\u10e1\u10d0 \u10d3\u10d0 \u10e8\u10d4\u10e1\u10d0\u10dc\u10d8\u10e8\u10dc\u10d0\u10d5\u10d8 \u10d4\u10da\u10d4\u10e5\u10e2\u10e0\u10e3\u10da\u10d8 \u10d8\u10d6\u10dd\u10da\u10d0\u10ea\u10d8\u10d8\u10e1 \u10d7\u10d5\u10d8\u10e1\u10d4\u10d1\u10d4\u10d1\u10d8\u10e1 \u10d2\u10d0\u10db\u10dd, \u10e0\u10d0\u10ea \u10d2\u10d0\u10e0\u10d9\u10d5\u10d4\u10e3\u10da \u10e8\u10d4\u10db\u10d7\u10ee\u10d5\u10d4\u10d5\u10d4\u10d1\u10e8\u10d8 \u10d1\u10d4\u10e0\u10d8\u10da\u10d8\u10e1\u10d7\u10d5\u10d8\u10e1 \u10d0\u10da\u10e2\u10d4\u10e0\u10dc\u10d0\u10e2\u10d8\u10e3\u10da \u10d0\u10e0\u10e9\u10d4\u10d5\u10d0\u10dc\u10e1 \u10ec\u10d0\u10e0\u10db\u10dd\u10d0\u10d3\u10d2\u10d4\u10dc\u10e1. \u10db\u10d8\u10e1\u10d8 \u10d3\u10d0\u10d1\u10d0\u10da\u10d8 \u10e1\u10d8\u10db\u10d9\u10d5\u10e0\u10d8\u10d5\u10d4 \u10d3\u10d0 \u10d4\u10da\u10d4\u10e5\u10e2\u10e0\u10e3\u10da\u10d8 \u10d7\u10d5\u10d8\u10e1\u10d4\u10d1\u10d4\u10d1\u10d8 \u10d0\u10da\u10e3\u10db\u10d8\u10dc\u10d8\u10e1 \u10dc\u10d8\u10e2\u10e0\u10d8\u10d3\u10e1 \u10d2\u10d0\u10dc\u10e1\u10d0\u10d9\u10e3\u10d7\u10e0\u10d4\u10d1\u10d8\u10d7 \u10e8\u10d4\u10e1\u10d0\u10e4\u10d4\u10e0\u10d8\u10e1 \u10db\u10d0\u10e1\u10d0\u10da\u10d0\u10d3 \u10d0\u10e5\u10ea\u10d4\u10d5\u10e1 \u10db\u10d9\u10d0\u10ea\u10e0\u10d8 \u10d3\u10d0\u10e8\u10d5\u10d4\u10d1\u10d4\u10d1\u10d8\u10e1 \u10db\u10e5\u10dd\u10dc\u10d4 \u10d9\u10dd\u10db\u10de\u10dd\u10dc\u10d4\u10dc\u10e2\u10d4\u10d1\u10d8\u10e1\u10d7\u10d5\u10d8\u10e1, \u10e0\u10dd\u10d2\u10dd\u10e0\u10d8\u10ea\u10d0\u10d0 \u10e0\u10d0\u10d3\u10d8\u10dd\u10e1\u10d8\u10ee\u10e8\u10d8\u10e0\u10d4\u10e3\u10da\u10d8 \u10d9\u10dd\u10db\u10de\u10dd\u10dc\u10d4\u10dc\u10e2\u10d4\u10d1\u10d8.<\/p>\n

\u10d0\u10da\u10e3\u10db\u10d8\u10dc\u10d8\u10e1 \u10dc\u10d8\u10e2\u10e0\u10d8\u10d3\u10d8 (AlN) \u10db\u10d8\u10db\u10d6\u10d8\u10d3\u10d5\u10d4\u10da\u10d8 \u10db\u10d0\u10e1\u10d0\u10da\u10d0\u10d0 \u10db\u10d8\u10d9\u10e0\u10dd\u10d4\u10da\u10d4\u10e5\u10e2\u10e0\u10dd\u10db\u10d4\u10e5\u10d0\u10dc\u10d8\u10d9\u10e3\u10e0\u10d8 \u10e1\u10d8\u10e1\u10e2\u10d4\u10db\u10d4\u10d1\u10d8\u10e1 (MEMS) \u10d2\u10d0\u10db\u10dd\u10e7\u10d4\u10dc\u10d4\u10d1\u10d8\u10e1\u10d7\u10d5\u10d8\u10e1, \u10e0\u10dd\u10d2\u10dd\u10e0\u10d8\u10ea\u10d0\u10d0 \u10db\u10d0\u10e6\u10d0\u10da\u10d8 \u10e1\u10d8\u10ee\u10e8\u10d8\u10e0\u10d8\u10e1 \u10e4\u10d8\u10da\u10e2\u10e0\u10d4\u10d1\u10d8 \u10d3\u10d0 \u10d4\u10dc\u10d4\u10e0\u10d2\u10d8\u10d8\u10e1 \u10d2\u10d0\u10db\u10dd\u10db\u10d7\u10d8\u10e8\u10d5\u10d4\u10da\u10d4\u10d1\u10d8, \u10e0\u10d0\u10d3\u10d2\u10d0\u10dc \u10db\u10d0\u10e1 \u10d0\u10e5\u10d5\u10e1 \u10e4\u10d0\u10e0\u10d7\u10dd \u10d0\u10d9\u10e0\u10eb\u10d0\u10da\u10e3\u10da\u10d8 \u10d6\u10dd\u10da\u10d8 \u10d3\u10d0 \u10de\u10d8\u10d4\u10d6\u10dd\u10d4\u10da\u10d4\u10e5\u10e2\u10e0\u10e3\u10da\u10d8 \u10d7\u10d5\u10d8\u10e1\u10d4\u10d1\u10d4\u10d1\u10d8, \u10e0\u10dd\u10db\u10da\u10d4\u10d1\u10d8\u10ea \u10e8\u10d4\u10d7\u10d0\u10d5\u10e1\u10d4\u10d1\u10d0\u10d3\u10d8\u10d0 \u10d9\u10dd\u10db\u10de\u10da\u10d4\u10db\u10d4\u10dc\u10e2\u10d0\u10e0\u10e3\u10da\u10d8 \u10db\u10d4\u10e2\u10d0\u10da\u10dd\u10e5\u10e1\u10d8\u10d3\u10e3\u10e0\u10d8 \u10dc\u10d0\u10ee\u10d4\u10d5\u10d0\u10e0\u10d2\u10d0\u10db\u10e2\u10d0\u10e0\u10d4\u10d1\u10d8\u10e1 (CMOS) \u10e2\u10d4\u10e5\u10dc\u10dd\u10da\u10dd\u10d2\u10d8\u10d0\u10e1\u10d7\u10d0\u10dc. \u10d2\u10d0\u10e0\u10d3\u10d0 \u10d0\u10db\u10d8\u10e1\u10d0, AlN-\u10d8\u10e1 \u10d3\u10d0\u10db\u10e3\u10e8\u10d0\u10d5\u10d4\u10d1\u10d0 \u10db\u10d0\u10e0\u10e2\u10d8\u10d5\u10d8\u10d0 \u10db\u10d8\u10e1\u10d8 \u10d3\u10d0\u10d1\u10d0\u10da\u10d8 \u10d3\u10dc\u10dd\u10d1\u10d8\u10e1 \u10e2\u10d4\u10db\u10de\u10d4\u10e0\u10d0\u10e2\u10e3\u10e0\u10d8\u10e1 \u10d2\u10d0\u10db\u10dd. \u10d7\u10e3\u10db\u10ea\u10d0, \u10d0\u10db \u10db\u10d0\u10e1\u10d0\u10da\u10d0\u10e1\u10d7\u10d0\u10dc \u10db\u10e3\u10e8\u10d0\u10dd\u10d1\u10d8\u10e1\u10d0\u10e1, \u10db\u10d9\u10d0\u10ea\u10e0\u10d8 \u10e2\u10dd\u10da\u10d4\u10e0\u10d0\u10dc\u10e2\u10e3\u10da\u10dd\u10d1\u10d8\u10e1 \u10d3\u10d0\u10ea\u10d5\u10d8\u10e1\u10d0\u10e1, \u10e1\u10d8\u10e0\u10d7\u10e3\u10da\u10d4\u10e1 \u10db\u10d8\u10e1\u10d8 \u10e1\u10d8\u10dc\u10e2\u10d4\u10e0\u10d4\u10d1\u10d8\u10e1 \u10e8\u10d4\u10db\u10d3\u10d4\u10d2 \u10e8\u10d4\u10d9\u10e3\u10db\u10e8\u10d5\u10d8\u10e1 \u10db\u10d0\u10e9\u10d5\u10d4\u10dc\u10d4\u10d1\u10da\u10d4\u10d1\u10d8 \u10e5\u10db\u10dc\u10d8\u10e1.<\/p>\n

\u10db\u10d0\u10e6\u10d0\u10da\u10d8 \u10db\u10d4\u10e5\u10d0\u10dc\u10d8\u10d9\u10e3\u10e0\u10d8 \u10e1\u10d8\u10db\u10e2\u10d9\u10d8\u10ea\u10d4<\/h2>\n

\u10d0\u10da\u10e3\u10db\u10d8\u10dc\u10d8\u10e1 \u10dc\u10d8\u10e2\u10e0\u10d8\u10d3\u10d8 \u10d2\u10d0\u10db\u10dd\u10d8\u10e0\u10e9\u10d4\u10d5\u10d0 \u10d2\u10d0\u10dc\u10e1\u10d0\u10d9\u10e3\u10d7\u10e0\u10d4\u10d1\u10e3\u10da\u10d8 \u10db\u10d4\u10e5\u10d0\u10dc\u10d8\u10d9\u10e3\u10e0\u10d8 \u10e1\u10d8\u10db\u10e2\u10d9\u10d8\u10ea\u10d8\u10d7, \u10e0\u10d0\u10ea \u10db\u10d0\u10e1 \u10dc\u10d0\u10ee\u10d4\u10d5\u10d0\u10e0\u10d2\u10d0\u10db\u10e2\u10d0\u10e0\u10d4\u10d1\u10d8\u10e1\u10d7\u10d5\u10d8\u10e1 \u10d9\u10d4\u10e0\u10d0\u10db\u10d8\u10d9\u10e3\u10da\u10d8 \u10e1\u10e3\u10d1\u10e1\u10e2\u10e0\u10d0\u10e2\u10d4\u10d1\u10d8\u10e1 \u10e8\u10d4\u10e1\u10d0\u10e5\u10db\u10dc\u10d4\u10da\u10d0\u10d3 \u10e8\u10d4\u10e1\u10d0\u10dc\u10d8\u10e8\u10dc\u10d0\u10d5 \u10db\u10d0\u10e1\u10d0\u10da\u10d0\u10d3 \u10d0\u10e5\u10ea\u10d4\u10d5\u10e1. \u10e0\u10dd\u10d2\u10dd\u10e0\u10ea \u10d0\u10db\u10df\u10d0\u10db\u10d0\u10d3 \u10d2\u10d0\u10db\u10dd\u10e7\u10d4\u10dc\u10d4\u10d1\u10e3\u10da\u10d8 \u10d4\u10e0\u10d7-\u10d4\u10e0\u10d7\u10d8 \u10e7\u10d5\u10d4\u10da\u10d0\u10d6\u10d4 \u10db\u10e2\u10d9\u10d8\u10ea\u10d4 \u10d9\u10d4\u10e0\u10d0\u10db\u10d8\u10d9\u10e3\u10da\u10d8 \u10db\u10d0\u10e1\u10d0\u10da\u10d0 \u2014 \u10e1\u10d8\u10da\u10d8\u10ea\u10d8\u10e3\u10db\u10d8\u10e1 \u10d9\u10d0\u10e0\u10d1\u10d8\u10d3\u10e1\u10d0 \u10d3\u10d0 \u10d0\u10da\u10e3\u10db\u10d8\u10dc\u10d8\u10e1 \u10dd\u10e5\u10e1\u10d8\u10d3\u10d6\u10d4 \u10db\u10d0\u10e6\u10d0\u10da\u10d8 \u10db\u10dd\u10ee\u10e0\u10d8\u10e1 \u10e1\u10d8\u10db\u10e2\u10d9\u10d8\u10ea\u10d8\u10d7 \u2014 \u10d3\u10d0 \u10d7\u10d0\u10d5\u10d8\u10e1\u10d8 \u10e8\u10d4\u10e1\u10d0\u10dc\u10d8\u10e8\u10dc\u10d0\u10d5\u10d8 \u10d7\u10d1\u10dd\u10d2\u10d0\u10db\u10e2\u10d0\u10e0\u10dd\u10d1\u10d8\u10e1 \u10d7\u10d5\u10d8\u10e1\u10d4\u10d1\u10d4\u10d1\u10d8\u10e1 \u10ec\u10e7\u10d0\u10da\u10dd\u10d1\u10d8\u10d7, \u10d8\u10e1 \u10d0\u10e1\u10d4\u10d5\u10d4 \u10d2\u10d0\u10db\u10dd\u10d8\u10e0\u10e9\u10d4\u10d5\u10d0 \u10db\u10d0\u10e6\u10d0\u10da\u10d8 \u10d4\u10da\u10d4\u10e5\u10e2\u10e0\u10dd\u10d8\u10d6\u10dd\u10da\u10d0\u10ea\u10d8\u10e3\u10e0\u10d8 \u10d7\u10d5\u10d8\u10e1\u10d4\u10d1\u10d4\u10d1\u10d8\u10d7.<\/p>\n

\u10d0\u10da\u10e3\u10db\u10d8\u10dc\u10d8\u10e1 \u10dc\u10d8\u10e2\u10e0\u10d8\u10d3\u10d8\u10e1 \u10d7\u10d5\u10d8\u10e1\u10d4\u10d1\u10d4\u10d1\u10d8\u10e1 \u10e3\u10dc\u10d8\u10d9\u10d0\u10da\u10e3\u10e0\u10d8 \u10d9\u10dd\u10db\u10d1\u10d8\u10dc\u10d0\u10ea\u10d8\u10d0 \u10db\u10d0\u10e1 \u10d8\u10d3\u10d4\u10d0\u10da\u10e3\u10e0\u10e1 \u10ee\u10d3\u10d8\u10e1 \u10d4\u10dc\u10d4\u10e0\u10d2\u10d4\u10e2\u10d8\u10d9\u10d8\u10e1\u10d0 \u10d3\u10d0 \u10db\u10d8\u10d9\u10e0\u10dd\u10d4\u10da\u10d4\u10e5\u10e2\u10e0\u10dd\u10dc\u10d8\u10d9\u10d8\u10e1 \u10d2\u10d0\u10db\u10dd\u10e7\u10d4\u10dc\u10d4\u10d1\u10d8\u10e1\u10d7\u10d5\u10d8\u10e1 \u10d3\u10d0 \u10ee\u10e8\u10d8\u10e0\u10d0\u10d3 \u10d4\u10db\u10e1\u10d0\u10ee\u10e3\u10e0\u10d4\u10d1\u10d0 \u10d1\u10d4\u10e0\u10d8\u10da\u10d8\u10e1 \u10dd\u10e5\u10e1\u10d8\u10d3\u10d8\u10e1 \u10d0\u10da\u10e2\u10d4\u10e0\u10dc\u10d0\u10e2\u10d8\u10d5\u10d0\u10d3 \u10d4\u10da\u10d4\u10e5\u10e2\u10e0\u10dd\u10dc\u10d8\u10d9\u10d0\u10e8\u10d8, BeO-\u10e1\u10d7\u10d0\u10dc \u10db\u10e3\u10e8\u10d0\u10dd\u10d1\u10d0\u10e1\u10d7\u10d0\u10dc \u10d3\u10d0\u10d9\u10d0\u10d5\u10e8\u10d8\u10e0\u10d4\u10d1\u10e3\u10da\u10d8 \u10ef\u10d0\u10dc\u10db\u10e0\u10d7\u10d4\u10da\u10dd\u10d1\u10d8\u10e1 \u10e0\u10d8\u10e1\u10d9\u10d4\u10d1\u10d8\u10e1 \u10d2\u10d0\u10db\u10dd. \u10d2\u10d0\u10e0\u10d3\u10d0 \u10d0\u10db\u10d8\u10e1\u10d0, \u10d0\u10da\u10e3\u10db\u10d8\u10dc\u10d8\u10e1 \u10dc\u10d8\u10e2\u10e0\u10d8\u10d3\u10d8 \u10d0\u10da\u10e3\u10db\u10d8\u10dc\u10d8\u10e1 \u10dd\u10e5\u10e1\u10d8\u10d3\u10e1\u10d0 \u10d3\u10d0 \u10d1\u10d4\u10e0\u10d8\u10da\u10d8\u10e1 \u10dd\u10e5\u10e1\u10d8\u10d3\u10d7\u10d0\u10dc \u10e8\u10d4\u10d3\u10d0\u10e0\u10d4\u10d1\u10d8\u10d7 \u10d1\u10d4\u10d5\u10e0\u10d0\u10d3 \u10d3\u10d0\u10d1\u10d0\u10da\u10d8 \u10d7\u10d4\u10e0\u10db\u10e3\u10da\u10d8 \u10d2\u10d0\u10e4\u10d0\u10e0\u10d7\u10dd\u10d4\u10d1\u10d8\u10e1 \u10d9\u10dd\u10d4\u10e4\u10d8\u10ea\u10d8\u10d4\u10dc\u10e2\u10d8\u10d7 \u10d2\u10d0\u10db\u10dd\u10d8\u10e0\u10e9\u10d4\u10d5\u10d0, \u10e0\u10d0\u10ea \u10db\u10d0\u10e1 \u10e8\u10d4\u10e1\u10d0\u10e4\u10d4\u10e0\u10d8\u10e1\u10e1 \u10ee\u10d3\u10d8\u10e1 \u10d3\u10d0\u10d1\u10d0\u10da \u10e2\u10d4\u10db\u10de\u10d4\u10e0\u10d0\u10e2\u10e3\u10e0\u10d0\u10d6\u10d4 \u10db\u10e3\u10e8\u10d0\u10dd\u10d1\u10d8\u10e1 \u10db\u10dd\u10d7\u10ee\u10dd\u10d5\u10dc\u10d4\u10d1\u10d8\u10e1 \u10db\u10e5\u10dd\u10dc\u10d4 \u10d2\u10d0\u10db\u10dd\u10e7\u10d4\u10dc\u10d4\u10d1\u10d4\u10d1\u10d8\u10e1\u10d7\u10d5\u10d8\u10e1.<\/p>\n

\u10eb\u10d0\u10da\u10dd\u10d5\u10d0\u10dc\u10d8 \u10dc\u10d0\u10ee\u10d4\u10d5\u10d0\u10e0\u10d2\u10d0\u10db\u10e2\u10d0\u10e0\u10d4\u10d1\u10d8\u10e1 \u10e2\u10d4\u10e5\u10dc\u10dd\u10da\u10dd\u10d2\u10d8\u10d0\u10e8\u10d8 \u10d1\u10dd\u10da\u10dd \u10d3\u10e0\u10dd\u10e1 \u10db\u10d8\u10e6\u10ec\u10d4\u10e3\u10da\u10db\u10d0 \u10de\u10e0\u10dd\u10d2\u10e0\u10d4\u10e1\u10db\u10d0 \u10d2\u10d0\u10d6\u10d0\u10e0\u10d3\u10d0 \u10d0\u10da\u10e2\u10d4\u10e0\u10dc\u10d0\u10e2\u10d8\u10e3\u10da\u10d8 \u10db\u10d0\u10e1\u10d0\u10da\u10d4\u10d1\u10d8\u10e1 \u10e1\u10d0\u10ed\u10d8\u10e0\u10dd\u10d4\u10d1\u10d0, \u10e0\u10dd\u10db\u10da\u10d4\u10d1\u10e1\u10d0\u10ea \u10e1\u10d8\u10d7\u10d1\u10dd\u10e1 \u10d4\u10e4\u10d4\u10e5\u10e2\u10e3\u10e0\u10d0\u10d3 \u10d2\u10d0\u10db\u10dd\u10e7\u10dd\u10e4\u10d0 \u10e8\u10d4\u10e3\u10eb\u10da\u10d8\u10d0\u10d7. \u10e2\u10e0\u10d0\u10d3\u10d8\u10ea\u10d8\u10e3\u10da\u10d8 \u10d9\u10d4\u10e0\u10d0\u10db\u10d8\u10d9\u10e3\u10da\u10d8 \u10e1\u10e3\u10d1\u10e1\u10e2\u10e0\u10d0\u10e2\u10d4\u10d1\u10d8, \u10db\u10d0\u10d7 \u10e8\u10dd\u10e0\u10d8\u10e1 \u10d0\u10da\u10e3\u10db\u10d8\u10dc\u10d8\u10e1 \u10dd\u10e5\u10e1\u10d8\u10d3\u10d8 (Al2O3) \u10d3\u10d0 \u10e1\u10d8\u10da\u10d8\u10ea\u10d8\u10e3\u10db\u10d8\u10e1 \u10dc\u10d8\u10e2\u10e0\u10d8\u10d3\u10d8 (Si3N4), \u10d0\u10db \u10d9\u10e3\u10d7\u10ee\u10d8\u10d7 \u10d0\u10e0\u10d0\u10e1\u10d0\u10d9\u10db\u10d0\u10e0\u10d8\u10e1\u10d0\u10d3 \u10d0\u10e6\u10db\u10dd\u10e9\u10dc\u10d3\u10d0, \u10e0\u10d8\u10e1 \u10d2\u10d0\u10db\u10dd\u10ea AlGalN \u10d7\u10d0\u10d5\u10d8\u10e1\u10d8 \u10e3\u10db\u10d0\u10e6\u10da\u10d4\u10e1\u10d8 \u10d7\u10d4\u10e0\u10db\u10e3\u10da\u10d8 \u10d2\u10d0\u10db\u10e2\u10d0\u10e0\u10dd\u10d1\u10d8\u10e1 \u10d2\u10d0\u10db\u10dd \u10de\u10dd\u10e2\u10d4\u10dc\u10ea\u10d8\u10e3\u10e0 \u10d9\u10d0\u10dc\u10d3\u10d8\u10d3\u10d0\u10e2\u10d0\u10d3 \u10ec\u10d0\u10e0\u10db\u10dd\u10e9\u10dc\u10d3\u10d0.<\/p>\n

\u10e1\u10d0\u10db\u10ec\u10e3\u10ee\u10d0\u10e0\u10dd\u10d3, Alumina-\u10d3\u10d0\u10dc AlGalN-\u10d6\u10d4 \u10d2\u10d0\u10d3\u10d0\u10e1\u10d5\u10da\u10d0 \u10d0\u10d6\u10dd\u10e2\u10d8\u10e1 \u10d0\u10e2\u10db\u10dd\u10e1\u10e4\u10d4\u10e0\u10dd\u10e8\u10d8 \u10d5\u10e0\u10ea\u10d4\u10da \u10d3\u10d0\u10db\u10e3\u10e8\u10d0\u10d5\u10d4\u10d1\u10d0\u10e1 \u10db\u10dd\u10d8\u10d7\u10ee\u10dd\u10d5\u10e1, \u10e0\u10d0\u10ea \u10d6\u10dd\u10d2\u10d8\u10d4\u10e0\u10d7\u10d8 \u10db\u10ec\u10d0\u10e0\u10db\u10dd\u10d4\u10d1\u10da\u10d8\u10e1\u10d7\u10d5\u10d8\u10e1 \u10ee\u10d0\u10dc\u10d2\u10e0\u10eb\u10da\u10d8\u10d5 \u10d5\u10d0\u10d3\u10d4\u10d1\u10e1 \u10d2\u10e3\u10da\u10d8\u10e1\u10ee\u10db\u10dd\u10d1\u10e1. \u10d0\u10db \u10d3\u10d0\u10d1\u10e0\u10d9\u10dd\u10da\u10d4\u10d1\u10d8\u10e1 \u10d2\u10d0\u10d3\u10d0\u10e1\u10d0\u10da\u10d0\u10ee\u10d0\u10d3, \u10d6\u10dd\u10d2\u10d8\u10d4\u10e0\u10d7\u10db\u10d0 \u10d9\u10dd\u10db\u10de\u10d0\u10dc\u10d8\u10d0\u10db \u10e8\u10d4\u10d8\u10db\u10e3\u10e8\u10d0\u10d5\u10d0 \u10d3\u10d0\u10db\u10e3\u10e8\u10d0\u10d5\u10d4\u10d1\u10d0\u10d3\u10d8 AlN \u10de\u10e0\u10dd\u10d3\u10e3\u10e5\u10e2\u10d4\u10d1\u10d8, \u10e0\u10dd\u10db\u10da\u10d4\u10d1\u10d8\u10ea \u10d8\u10ec\u10d0\u10e0\u10db\u10dd\u10d4\u10d1\u10d0 \u10d1\u10d8\u10da\u10d4\u10e2\u10d4\u10d1\u10d8\u10e1 \u10e1\u10d0\u10ee\u10d8\u10d7, \u10db\u10d0\u10d7\u10d8 \u10d3\u10d0\u10db\u10e3\u10e8\u10d0\u10d5\u10d4\u10d1\u10d0 \u10e8\u10d4\u10e1\u10d0\u10eb\u10da\u10d4\u10d1\u10d4\u10da\u10d8\u10d0 \u10d0\u10da\u10db\u10d0\u10e1\u10d8\u10e1 \u10d8\u10dc\u10e1\u10e2\u10e0\u10e3\u10db\u10d4\u10dc\u10e2\u10d4\u10d1\u10d8\u10e1 \u10d2\u10d0\u10e0\u10d4\u10e8\u10d4 \u10d3\u10d0 \u10e3\u10e4\u10e0\u10dd \u10ee\u10d0\u10e0\u10ef\u10d4\u10e4\u10d4\u10e5\u10e2\u10e3\u10e0\u10d8\u10d0, \u10d5\u10d8\u10d3\u10e0\u10d4 \u10e1\u10e3\u10e4\u10d7\u10d0 AlN. \u10d4\u10e1 \u10d3\u10d0\u10db\u10e3\u10e8\u10d0\u10d5\u10d4\u10d1\u10d0\u10d3\u10d8 \u10de\u10e0\u10dd\u10d3\u10e3\u10e5\u10e2\u10d4\u10d1\u10d8 \u10d0\u10e1\u10d4\u10d5\u10d4 \u10e8\u10d4\u10e1\u10d0\u10eb\u10da\u10d4\u10d1\u10d4\u10da\u10d8\u10d0 \u10e0\u10d0\u10db\u10d3\u10d4\u10dc\u10d8\u10db\u10d4 \u10db\u10dd\u10db\u10ec\u10dd\u10d3\u10d4\u10d1\u10da\u10d8\u10e1\u10d2\u10d0\u10dc \u10e8\u10d4\u10d8\u10eb\u10d8\u10dc\u10dd\u10d7, \u10e0\u10d0\u10ea \u10db\u10d8\u10ec\u10dd\u10d3\u10d4\u10d1\u10d8\u10e1 \u10d5\u10d0\u10d3\u10d4\u10d1\u10e1 \u10d9\u10d8\u10d3\u10d4\u10d5 \u10e3\u10e4\u10e0\u10dd \u10d0\u10db\u10ea\u10d8\u10e0\u10d4\u10d1\u10e1.<\/p>\n

\u10db\u10d0\u10e6\u10d0\u10da\u10d8 \u10ec\u10d8\u10dc\u10d0\u10d0\u10e6\u10db\u10d3\u10d4\u10d2\u10dd\u10d1\u10d0 \u10df\u10d0\u10dc\u10d2\u10d5\u10d8\u10e1 \u10db\u10d8\u10db\u10d0\u10e0\u10d7<\/h2>\n

\u10d0\u10da\u10e3\u10db\u10d8\u10dc\u10d8\u10e1 \u10dc\u10d8\u10e2\u10e0\u10d8\u10d3\u10d8 (AlN) \u10d0\u10e0\u10d8\u10e1 \u10d0\u10da\u10e3\u10db\u10d8\u10dc\u10d8\u10e1 \u10db\u10e7\u10d0\u10e0\u10d8 \u10dc\u10d8\u10e2\u10e0\u10d8\u10d3\u10d8, \u10e0\u10dd\u10db\u10d4\u10da\u10e1\u10d0\u10ea \u10d0\u10ee\u10d0\u10e1\u10d8\u10d0\u10d7\u10d4\u10d1\u10e1 \u10db\u10d0\u10e6\u10d0\u10da\u10d8 \u10d7\u10d1\u10dd\u10d2\u10d0\u10db\u10e2\u10d0\u10e0\u10dd\u10d1\u10d0 \u10d3\u10d0 \u10e8\u10d4\u10e1\u10d0\u10dc\u10d8\u10e8\u10dc\u10d0\u10d5\u10d8 \u10d4\u10da\u10d4\u10e5\u10e2\u10e0\u10dd\u10d8\u10d6\u10dd\u10da\u10d0\u10ea\u10d8\u10e3\u10e0\u10d8 \u10d7\u10d5\u10d8\u10e1\u10d4\u10d1\u10d4\u10d1\u10d8. \u10d2\u10d0\u10e0\u10d3\u10d0 \u10d0\u10db\u10d8\u10e1\u10d0, AlN-\u10d8\u10e1 \u10db\u10d3\u10d2\u10e0\u10d0\u10d3\u10dd\u10d1\u10d0 \u10dd\u10e5\u10e1\u10d8\u10d3\u10d0\u10ea\u10d8\u10d8\u10e1, \u10d0\u10d1\u10e0\u10d0\u10d6\u10d8\u10d8\u10e1\u10d0 \u10d3\u10d0 \u10d9\u10dd\u10e0\u10dd\u10d6\u10d8\u10d8\u10e1 \u10db\u10d8\u10db\u10d0\u10e0\u10d7 \u10d8\u10ea\u10d0\u10d5\u10e1 \u10db\u10d0\u10e1 \u10d0\u10da\u10e3\u10db\u10d8\u10dc\u10d8\u10e1 \u10d3\u10dc\u10dd\u10d1\u10d8\u10e1\u10d0 \u10d3\u10d0 \u10d2\u10d0\u10da\u10d8\u10e3\u10db\u10d8\u10e1 \u10d0\u10e0\u10e1\u10d4\u10dc\u10d8\u10d3\u10d8\u10e1 \u10d9\u10dd\u10e0\u10dd\u10d6\u10d8\u10d8\u10e1\u10d2\u10d0\u10dc \u10d2\u10d0\u10db\u10dd\u10ec\u10d5\u10d4\u10e3\u10da\u10d8 \u10d3\u10d0\u10d6\u10d8\u10d0\u10dc\u10d4\u10d1\u10d8\u10e1\u10d2\u10d0\u10dc; \u10d0\u10db\u10d0\u10e1\u10d7\u10d0\u10dc\u10d0\u10d5\u10d4, \u10d8\u10e1 \u10d0\u10e0\u10d0\u10e2\u10dd\u10e5\u10e1\u10d8\u10d9\u10e3\u10e0\u10d8\u10d0.<\/p>\n

\u10d0\u10e2\u10db\u10dd\u10e1\u10e4\u10d4\u10e0\u10e3\u10da\u10d8 \u10de\u10da\u10d0\u10e1\u10e2\u10db\u10d0\u10e1\u10d8 \u10d8\u10d3\u10d4\u10d0\u10da\u10e3\u10e0\u10d8 \u10db\u10d0\u10e1\u10d0\u10da\u10d0\u10d0 \u10db\u10d9\u10d0\u10ea\u10e0 \u10d2\u10d0\u10e0\u10d4\u10db\u10dd\u10e8\u10d8 \u10d2\u10d0\u10db\u10dd\u10e1\u10d0\u10e7\u10d4\u10dc\u10d4\u10d1\u10da\u10d0\u10d3, \u10e0\u10d0\u10d3\u10d2\u10d0\u10dc \u10db\u10d0\u10e1 \u10e8\u10d4\u10e3\u10eb\u10da\u10d8\u10d0 \u10d2\u10d0\u10e3\u10eb\u10da\u10dd\u10e1 \u10db\u10d0\u10e6\u10d0\u10da \u10e2\u10d4\u10db\u10de\u10d4\u10e0\u10d0\u10e2\u10e3\u10e0\u10d0\u10e1\u10d0 \u10d3\u10d0 \u10e5\u10d8\u10db\u10d8\u10e3\u10e0 \u10ea\u10d5\u10d4\u10d7\u10d0\u10e1, \u10e0\u10d0\u10ea \u10db\u10d0\u10e1 \u10e1\u10e0\u10e3\u10da\u10e7\u10dd\u10e4\u10d8\u10da \u10db\u10d0\u10e1\u10d0\u10da\u10d0\u10d3 \u10d0\u10e5\u10ea\u10d4\u10d5\u10e1 \u10d5\u10d8\u10d1\u10e0\u10d0\u10ea\u10d8\u10d8\u10e1\u10d0 \u10d3\u10d0 \u10d3\u10d0\u10eb\u10d0\u10d1\u10e3\u10da\u10dd\u10d1\u10d8\u10e1 \u10d0\u10e1\u10d0\u10e2\u10d0\u10dc\u10d0\u10d3, \u10d4\u10da\u10d4\u10e5\u10e2\u10e0\u10e3\u10da\u10d0\u10d3 \u10d2\u10d0\u10db\u10e2\u10d0\u10e0 \u10d3\u10d0 \u10e3\u10da\u10e2\u10e0\u10d0\u10d8\u10d8\u10e1\u10e4\u10d4\u10e0\u10d8 \u10e1\u10ee\u10d8\u10d5\u10d4\u10d1\u10d8\u10e1\u10d0\u10d3\u10db\u10d8 \u10db\u10d3\u10d2\u10e0\u10d0\u10d3 \u10db\u10d3\u10d2\u10dd\u10db\u10d0\u10e0\u10d4\u10dd\u10d1\u10d0\u10e8\u10d8. \u10d2\u10d0\u10e0\u10d3\u10d0 \u10d0\u10db\u10d8\u10e1\u10d0, \u10db\u10d0\u10e1 \u10d0\u10e1\u10d4\u10d5\u10d4 \u10e8\u10d4\u10e3\u10eb\u10da\u10d8\u10d0 \u10db\u10d0\u10e6\u10d0\u10da\u10d8 \u10eb\u10d0\u10d1\u10d5\u10d8\u10e1 \u10d0\u10e2\u10d0\u10dc\u10d0, \u10ee\u10dd\u10da\u10dd \u10db\u10d8\u10e1\u10d8 \u10db\u10d4\u10e5\u10d0\u10dc\u10d8\u10d9\u10e3\u10e0\u10d8 \u10e1\u10d8\u10db\u10e2\u10d9\u10d8\u10ea\u10d4 \u10db\u10d0\u10e1 \u10d5\u10d8\u10d1\u10e0\u10d0\u10ea\u10d8\u10d8\u10e1\u10d0 \u10d3\u10d0 \u10d3\u10d0\u10eb\u10d0\u10d1\u10e3\u10da\u10dd\u10d1\u10d8\u10e1\u10d0\u10d3\u10db\u10d8 \u10ec\u10d8\u10dc\u10d0\u10d0\u10e6\u10db\u10d3\u10d4\u10d2\u10dd\u10d1\u10d8\u10e1 \u10d2\u10d0\u10e1\u10d0\u10ec\u10d4\u10d5\u10d0\u10d3 \u10e8\u10d4\u10e1\u10d0\u10e4\u10d4\u10e0\u10d8\u10e1\u10e1 \u10ee\u10d3\u10d8\u10e1. \u10d1\u10dd\u10da\u10dd\u10e1, \u10d4\u10da\u10d4\u10e5\u10e2\u10e0\u10e3\u10da\u10d8 \u10d2\u10d0\u10db\u10e2\u10d0\u10e0\u10dd\u10d1\u10d0 \u10d3\u10d0 \u10e3\u10da\u10e2\u10e0\u10d0\u10d8\u10d8\u10e1\u10e4\u10d4\u10e0\u10d8 \u10e1\u10ee\u10d8\u10d5\u10d4\u10d1\u10d8\u10e1\u10d0\u10d3\u10db\u10d8 \u10db\u10d3\u10d2\u10e0\u10d0\u10d3\u10dd\u10d1\u10d0 \u10d0\u10db \u10de\u10da\u10d0\u10e1\u10e2\u10db\u10d0\u10e1\u10e1 \u10e8\u10d4\u10e1\u10d0\u10dc\u10d8\u10e8\u10dc\u10d0\u10d5 \u10db\u10d0\u10e1\u10d0\u10da\u10d0\u10d3 \u10d0\u10e5\u10ea\u10d4\u10d5\u10e1.<\/p>\n

\u10d0\u10db \u10db\u10d0\u10e1\u10d0\u10da\u10d8\u10e1 \u10d3\u10d0\u10db\u10e3\u10e8\u10d0\u10d5\u10d4\u10d1\u10d0 \u10e8\u10d4\u10e1\u10d0\u10eb\u10da\u10d4\u10d1\u10d4\u10da\u10d8\u10d0 \u10e1\u10e2\u10d0\u10dc\u10d3\u10d0\u10e0\u10e2\u10e3\u10da\u10d8 \u10e1\u10d0\u10ed\u10e0\u10d4\u10da\u10d8 \u10d8\u10dc\u10e1\u10e2\u10e0\u10e3\u10db\u10d4\u10dc\u10e2\u10d4\u10d1\u10d8\u10d7, \u10e0\u10d0\u10ea \u10e3\u10d6\u10e0\u10e3\u10dc\u10d5\u10d4\u10da\u10e7\u10dd\u10e4\u10e1 \u10db\u10d8\u10e1 \u10e8\u10d4\u10e1\u10d0\u10dc\u10d8\u10e8\u10dc\u10d0\u10d5 \u10db\u10d4\u10e5\u10d0\u10dc\u10d8\u10d9\u10e3\u10e0 \u10e1\u10d8\u10db\u10e2\u10d9\u10d8\u10ea\u10d4\u10e1\u10d0 \u10d3\u10d0 \u10d3\u10d0\u10db\u10e3\u10e8\u10d0\u10d5\u10d4\u10d1\u10d0\u10d3\u10dd\u10d1\u10d0\u10e1. \u10d2\u10d0\u10e0\u10d3\u10d0 \u10d0\u10db\u10d8\u10e1\u10d0, \u10db\u10d8\u10e1\u10d8 \u10d3\u10d0\u10d1\u10d0\u10da\u10d8 \u10e1\u10d8\u10db\u10d9\u10d5\u10e0\u10d8\u10d5\u10d4 \u10db\u10d0\u10e1 \u10e8\u10d4\u10e1\u10d0\u10e4\u10d4\u10e0\u10d8\u10e1\u10e1 \u10ee\u10d3\u10d8\u10e1 \u10db\u10e1\u10e3\u10d1\u10e3\u10e5\u10d8 \u10d9\u10dd\u10db\u10de\u10dd\u10dc\u10d4\u10dc\u10e2\u10d4\u10d1\u10d8\u10e1\u10d0 \u10d3\u10d0 \u10e1\u10d0\u10f0\u10d0\u10d4\u10e0\u10dd-\u10d9\u10dd\u10e1\u10db\u10dd\u10e1\u10e3\u10e0\u10d8 \u10e5\u10d5\u10d4\u10e1\u10d8\u10e1\u10e2\u10d4\u10db\u10d4\u10d1\u10d8\u10e1\u10d7\u10d5\u10d8\u10e1, \u10d0\u10db\u10d0\u10e1\u10d7\u10d0\u10dc\u10d0\u10d5\u10d4, \u10d8\u10e1 \u10e3\u10e4\u10e0\u10dd \u10d2\u10d0\u10db\u10eb\u10da\u10d4\u10d0, \u10d5\u10d8\u10d3\u10e0\u10d4 FR-4 \u10e2\u10d8\u10de\u10d8\u10e1 \u10e9\u10d5\u10d4\u10e3\u10da\u10d4\u10d1\u10e0\u10d8\u10d5\u10d8 \u10d0\u10da\u10e3\u10db\u10d8\u10dc\u10d8\u10e1 \u10d0\u10dc \u10e1\u10de\u10d8\u10da\u10d4\u10dc\u10eb\u10d8\u10d7 \u10d3\u10d0\u10e4\u10d0\u10e0\u10e3\u10da\u10d8 \u10d1\u10d4\u10ed\u10d3\u10e3\u10e0\u10d8 \u10de\u10da\u10d0\u10e2\u10d4\u10d1\u10d8.<\/p>\n

\u10d5\u10e3\u10da\u10d0\u10db\u10d8\u10e1 \u10ea\u10d5\u10da\u10d0\u10d3\u10d8 \u10d9\u10e3\u10d7\u10ee\u10d8\u10e1 \u10e1\u10de\u10d4\u10e5\u10e2\u10e0\u10dd\u10e1\u10d9\u10dd\u10de\u10e3\u10da\u10d8 \u10d4\u10da\u10d8\u10de\u10e1\u10dd\u10db\u10d4\u10e2\u10e0\u10d8 (\u10da\u10d8\u10dc\u10d9\u10dd\u10da\u10dc\u10d8, \u10dc\u10d4\u10d1\u10e0\u10d0\u10e1\u10d9\u10d0, \u10d0\u10e8\u10e8) \u10d2\u10d0\u10db\u10dd\u10e7\u10d4\u10dc\u10d4\u10d1\u10e3\u10da \u10d8\u10e5\u10dc\u10d0 S1 \u10d3\u10d0 S4 AlN\/Si \u10dc\u10d8\u10db\u10e3\u10e8\u10d4\u10d1\u10d8\u10e1 \u10db\u10d0\u10ee\u10d0\u10e1\u10d8\u10d0\u10d7\u10d4\u10d1\u10da\u10d4\u10d1\u10d8\u10e1 \u10d3\u10d0\u10e1\u10d0\u10d3\u10d2\u10d4\u10dc\u10d0\u10d3 \u10e1\u10ee\u10d5\u10d0\u10d3\u10d0\u10e1\u10ee\u10d5\u10d0 \u10e4\u10d4\u10dc\u10d8\u10e1 \u10e1\u10d8\u10e1\u10e5\u10d8\u10d7, XPS \u10d6\u10dd\u10dc\u10d3\u10d8\u10e1 \u10d2\u10d0\u10db\u10dd\u10e7\u10d4\u10dc\u10d4\u10d1\u10d8\u10d7, \u10e1\u10d0\u10d3\u10d0\u10ea N 1s \u10e4\u10dd\u10e2\u10dd\u10d4\u10da\u10d4\u10e5\u10e2\u10e0\u10dd\u10dc\u10d8\u10e1 \u10de\u10d8\u10d9\u10d8\u10e1 \u10db\u10d8\u10d1\u10db\u10e3\u10da\u10d8 \u10d4\u10dc\u10d4\u10e0\u10d2\u10d8\u10d0 \u10d2\u10d0\u10d6\u10dd\u10db\u10d8\u10da \u10d8\u10e5\u10dc\u10d0 396.2 \u10d4\u0412-\u10d8\u10e1 \u10e2\u10dd\u10da\u10d8, \u10e0\u10d0\u10ea \u10d9\u10d0\u10e0\u10d2 \u10e8\u10d4\u10e1\u10d0\u10d1\u10d0\u10db\u10d8\u10e1\u10dd\u10d1\u10d0\u10e8\u10d8\u10d0 \u10d4\u10e5\u10e1\u10de\u10d4\u10e0\u10d8\u10db\u10d4\u10dc\u10e2\u10e3\u10da \u10db\u10dd\u10dc\u10d0\u10ea\u10d4\u10db\u10d4\u10d1\u10d7\u10d0\u10dc.<\/p>\n

\u10e2\u10dd\u10d9\u10d8\u10e3\u10d0\u10db\u10d0\u10e1 Shapal Hi M Soft \u10d0\u10da\u10e3\u10db\u10d8\u10dc\u10d8\u10e1 \u10dc\u10d8\u10e2\u10e0\u10d8\u10d3\u10d8\u10e1 \u10db\u10d0\u10e1\u10d0\u10da\u10d0 \u10d2\u10d0\u10db\u10dd\u10d8\u10e0\u10e9\u10d4\u10d5\u10d0 \u10e8\u10d4\u10e1\u10d0\u10dc\u10d8\u10e8\u10dc\u10d0\u10d5\u10d8 \u10d3\u10d0\u10db\u10e3\u10e8\u10d0\u10d5\u10d4\u10d1\u10d0\u10d3\u10dd\u10d1\u10d8\u10d7\u10d0 \u10d3\u10d0 \u10db\u10d4\u10e5\u10d0\u10dc\u10d8\u10d9\u10e3\u10e0\u10d8 \u10e1\u10d8\u10db\u10e2\u10d9\u10d8\u10ea\u10d8\u10d7. \u10d8\u10e1 \u10d3\u10d0\u10db\u10d6\u10d0\u10d3\u10d4\u10d1\u10e3\u10da\u10d8\u10d0 \u10e3\u10dc\u10d8\u10d9\u10d0\u10da\u10e3\u10e0\u10d8 \u10de\u10e0\u10dd\u10ea\u10d4\u10e1\u10d8\u10d7, \u10e0\u10dd\u10db\u10da\u10d8\u10e1 \u10d3\u10e0\u10dd\u10e1\u10d0\u10ea \u10e1\u10d8\u10db\u10e7\u10d0\u10e0\u10d8\u10e1 \u10d2\u10d0\u10e1\u10d0\u10d6\u10e0\u10d3\u10d4\u10da\u10d0\u10d3 \u10db\u10d0\u10e1\u10e8\u10d8 \u10d1\u10dd\u10e0\u10d8\u10e1 \u10dc\u10d8\u10e2\u10e0\u10d8\u10d3\u10d8 \u10d4\u10db\u10d0\u10e2\u10d4\u10d1\u10d0 \u2013 \u10d8\u10d3\u10d4\u10d0\u10da\u10e3\u10e0\u10d8\u10d0 \u10db\u10e0\u10d0\u10d5\u10d0\u10da\u10d8 \u10e1\u10d0\u10ee\u10d8\u10e1 \u10d2\u10d0\u10db\u10dd\u10e7\u10d4\u10dc\u10d4\u10d1\u10d8\u10e1\u10d7\u10d5\u10d8\u10e1.<\/p>\n

\"\u10d0\u10da\u10e3\u10db\u10d8\u10dc\u10d8\u10e1<\/p>","protected":false},"excerpt":{"rendered":"

Aluminum Nitride and Aluminum Nitride Aluminum Nitride (AlN) is an ideal material to use in thermal applications. With high thermal […]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_seopress_robots_primary_cat":"none","_seopress_titles_title":"","_seopress_titles_desc":"","_seopress_robots_index":"","site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[2],"tags":[],"class_list":["post-14","post","type-post","status-publish","format-standard","hentry","category-products-related"],"_links":{"self":[{"href":"https:\/\/aluminiumnitride.com\/ka\/wp-json\/wp\/v2\/posts\/14","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/aluminiumnitride.com\/ka\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/aluminiumnitride.com\/ka\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/aluminiumnitride.com\/ka\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/aluminiumnitride.com\/ka\/wp-json\/wp\/v2\/comments?post=14"}],"version-history":[{"count":3,"href":"https:\/\/aluminiumnitride.com\/ka\/wp-json\/wp\/v2\/posts\/14\/revisions"}],"predecessor-version":[{"id":29,"href":"https:\/\/aluminiumnitride.com\/ka\/wp-json\/wp\/v2\/posts\/14\/revisions\/29"}],"wp:attachment":[{"href":"https:\/\/aluminiumnitride.com\/ka\/wp-json\/wp\/v2\/media?parent=14"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/aluminiumnitride.com\/ka\/wp-json\/wp\/v2\/categories?post=14"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/aluminiumnitride.com\/ka\/wp-json\/wp\/v2\/tags?post=14"}],"curies":[{"name":"\u10d5\u10dd\u10e0\u10d3\u10de\u10e0\u10d4\u10e1\u10d8","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}