{"id":14,"date":"2024-09-15T18:25:01","date_gmt":"2024-09-15T10:25:01","guid":{"rendered":"https:\/\/aluminiumnitride.com\/?p=14"},"modified":"2024-12-21T20:17:57","modified_gmt":"2024-12-21T12:17:57","slug":"%ce%bd%ce%b9%cf%84%cf%81%ce%af%ce%b4%ce%b9%ce%bf-%cf%84%ce%bf%cf%85-%ce%b1%ce%bb%ce%bf%cf%85%ce%bc%ce%b9%ce%bd%ce%af%ce%bf%cf%85","status":"publish","type":"post","link":"https:\/\/aluminiumnitride.com\/el\/%ce%bd%ce%b9%cf%84%cf%81%ce%af%ce%b4%ce%b9%ce%bf-%cf%84%ce%bf%cf%85-%ce%b1%ce%bb%ce%bf%cf%85%ce%bc%ce%b9%ce%bd%ce%af%ce%bf%cf%85\/","title":{"rendered":"\u03bd\u03b9\u03c4\u03c1\u03af\u03b4\u03b9\u03bf \u03c4\u03bf\u03c5 \u03b1\u03bb\u03bf\u03c5\u03bc\u03b9\u03bd\u03af\u03bf\u03c5"},"content":{"rendered":"

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\u03a4\u03bf \u03bd\u03b9\u03c4\u03c1\u03af\u03b4\u03b9\u03bf \u03c4\u03bf\u03c5 \u03b1\u03c1\u03b3\u03b9\u03bb\u03af\u03bf\u03c5 (AlN) \u03b5\u03af\u03bd\u03b1\u03b9 \u03ad\u03bd\u03b1 \u03b9\u03b4\u03b1\u03bd\u03b9\u03ba\u03cc \u03c5\u03bb\u03b9\u03ba\u03cc \u03b3\u03b9\u03b1 \u03c7\u03c1\u03ae\u03c3\u03b7 \u03c3\u03b5 \u03b8\u03b5\u03c1\u03bc\u03b9\u03ba\u03ad\u03c2 \u03b5\u03c6\u03b1\u03c1\u03bc\u03bf\u03b3\u03ad\u03c2. \u039c\u03b5 \u03c5\u03c8\u03b7\u03bb\u03ae \u03b8\u03b5\u03c1\u03bc\u03b9\u03ba\u03ae \u03b1\u03b3\u03c9\u03b3\u03b9\u03bc\u03cc\u03c4\u03b7\u03c4\u03b1, \u03bc\u03bf\u03bd\u03c9\u03c4\u03b9\u03ba\u03ad\u03c2 \u03b9\u03b4\u03b9\u03cc\u03c4\u03b7\u03c4\u03b5\u03c2 \u03ba\u03b1\u03b9 \u03c7\u03b1\u03bc\u03b7\u03bb\u03cc \u03c3\u03c5\u03bd\u03c4\u03b5\u03bb\u03b5\u03c3\u03c4\u03ae \u03b8\u03b5\u03c1\u03bc\u03b9\u03ba\u03ae\u03c2 \u03b4\u03b9\u03b1\u03c3\u03c4\u03bf\u03bb\u03ae\u03c2, \u03c4\u03bf AlN \u03b1\u03c0\u03bf\u03c4\u03b5\u03bb\u03b5\u03af \u03bc\u03b9\u03b1 \u03b5\u03bb\u03ba\u03c5\u03c3\u03c4\u03b9\u03ba\u03ae \u03b5\u03c0\u03b9\u03bb\u03bf\u03b3\u03ae \u03c5\u03bb\u03b9\u03ba\u03bf\u03cd \u03c0\u03bf\u03c5 \u03b5\u03af\u03bd\u03b1\u03b9 \u03b1\u03c3\u03c6\u03b1\u03bb\u03ae\u03c2 \u03b5\u03bd\u03b1\u03bb\u03bb\u03b1\u03ba\u03c4\u03b9\u03ba\u03ae \u03bb\u03cd\u03c3\u03b7 \u03b3\u03b9\u03b1 \u03c4\u03bf \u03bf\u03be\u03b5\u03af\u03b4\u03b9\u03bf \u03c4\u03bf\u03c5 \u03b2\u03b7\u03c1\u03c5\u03bb\u03bb\u03af\u03bf\u03c5 \u03c3\u03b5 \u03b5\u03c6\u03b1\u03c1\u03bc\u03bf\u03b3\u03ad\u03c2 \u03c4\u03b7\u03c2 \u03b2\u03b9\u03bf\u03bc\u03b7\u03c7\u03b1\u03bd\u03af\u03b1\u03c2 \u03b7\u03bc\u03b9\u03b1\u03b3\u03c9\u03b3\u03ce\u03bd \u03ba\u03b1\u03b9 \u03b5\u03cd\u03ba\u03bf\u03bb\u03bf \u03c3\u03c4\u03b7\u03bd \u03ba\u03b1\u03c4\u03b5\u03c1\u03b3\u03b1\u03c3\u03af\u03b1.<\/p>\n

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\u03a4\u03bf AlN \u03ad\u03c7\u03b5\u03b9 \u03c0\u03c5\u03ba\u03bd\u03cc\u03c4\u03b7\u03c4\u03b1 3,26 g\/cm3, \u03ba\u03b1\u03b8\u03ce\u03c2 \u03ba\u03b1\u03b9 \u03b5\u03be\u03b1\u03b9\u03c1\u03b5\u03c4\u03b9\u03ba\u03ac \u03c5\u03c8\u03b7\u03bb\u03ae \u03b8\u03b5\u03c1\u03bc\u03b9\u03ba\u03ae \u03b1\u03b3\u03c9\u03b3\u03b9\u03bc\u03cc\u03c4\u03b7\u03c4\u03b1 170 W\/(m-K), \u03c0\u03ac\u03bd\u03c9 \u03b1\u03c0\u03cc \u03c0\u03ad\u03bd\u03c4\u03b5 \u03c6\u03bf\u03c1\u03ad\u03c2 \u03bc\u03b5\u03b3\u03b1\u03bb\u03cd\u03c4\u03b5\u03c1\u03b7 \u03b1\u03c0\u03cc \u03b5\u03ba\u03b5\u03af\u03bd\u03b7 \u03c4\u03b7\u03c2 \u03b1\u03bb\u03bf\u03c5\u03bc\u03af\u03bd\u03b1\u03c2 \u03ba\u03b1\u03b9 \u03c0\u03bb\u03b7\u03c3\u03b9\u03ac\u03b6\u03b5\u03b9 \u03c4\u03b7 \u03b2\u03b7\u03c1\u03c5\u03bb\u03bb\u03af\u03b1 \u03cc\u03c3\u03bf\u03bd \u03b1\u03c6\u03bf\u03c1\u03ac \u03c4\u03b7 \u03b8\u03b5\u03c1\u03bc\u03b9\u03ba\u03ae \u03b1\u03b3\u03c9\u03b3\u03b9\u03bc\u03cc\u03c4\u03b7\u03c4\u03b1. \u0394\u03c5\u03c3\u03c4\u03c5\u03c7\u03ce\u03c2, \u03cc\u03bc\u03c9\u03c2, \u03b7 \u03b8\u03b5\u03c1\u03bc\u03b9\u03ba\u03ae \u03b1\u03b3\u03c9\u03b3\u03b9\u03bc\u03cc\u03c4\u03b7\u03c4\u03b1 \u03c4\u03bf\u03c5 AlN \u03bc\u03c0\u03bf\u03c1\u03b5\u03af \u03bd\u03b1 \u03bc\u03b5\u03b9\u03c9\u03b8\u03b5\u03af \u03b1\u03c0\u03cc \u03c0\u03c1\u03bf\u03c3\u03bc\u03af\u03be\u03b5\u03b9\u03c2 \u03bf\u03be\u03c5\u03b3\u03cc\u03bd\u03bf\u03c5 \u03c0\u03bf\u03c5 \u03c5\u03c0\u03ac\u03c1\u03c7\u03bf\u03c5\u03bd \u03c3\u03c4\u03b9\u03c2 \u03b1\u03c1\u03c7\u03b9\u03ba\u03ad\u03c2 \u03c3\u03ba\u03cc\u03bd\u03b5\u03c2 \u03ba\u03b1\u03c4\u03ac \u03c4\u03b7 \u03b4\u03b9\u03ac\u03c1\u03ba\u03b5\u03b9\u03b1 \u03c4\u03c9\u03bd \u03b4\u03b9\u03b1\u03b4\u03b9\u03ba\u03b1\u03c3\u03b9\u03ce\u03bd \u03c0\u03c5\u03c1\u03bf\u03c3\u03c5\u03c3\u03c3\u03c9\u03bc\u03ac\u03c4\u03c9\u03c3\u03b7\u03c2.<\/p>\n

\u0393\u03b9\u03b1 \u03c4\u03b7 \u03b2\u03b5\u03bb\u03c4\u03af\u03c9\u03c3\u03b7 \u03c4\u03b7\u03c2 \u03b8\u03b5\u03c1\u03bc\u03b9\u03ba\u03ae\u03c2 \u03b1\u03b3\u03c9\u03b3\u03b9\u03bc\u03cc\u03c4\u03b7\u03c4\u03b1\u03c2, \u03b7 \u03c3\u03ba\u03cc\u03bd\u03b7 \u03b1\u03bd\u03b1\u03bc\u03b9\u03b3\u03bd\u03cd\u03b5\u03c4\u03b1\u03b9 \u03bc\u03b5 \u03b2\u03bf\u03b7\u03b8\u03ae\u03bc\u03b1\u03c4\u03b1 \u03c0\u03c5\u03c1\u03bf\u03c3\u03c5\u03c3\u03c3\u03c9\u03bc\u03ac\u03c4\u03c9\u03c3\u03b7\u03c2 \u03cc\u03c0\u03c9\u03c2 CaO \u03ba\u03b1\u03b9 Y2O3. \u03a3\u03c4\u03b7 \u03c3\u03c5\u03bd\u03ad\u03c7\u03b5\u03b9\u03b1, \u03c4\u03b1 \u03c3\u03c9\u03bc\u03b1\u03c4\u03af\u03b4\u03b9\u03b1 \u03b1\u03bb\u03ad\u03b8\u03bf\u03bd\u03c4\u03b1\u03b9 \u03c3\u03b5 \u03b5\u03be\u03b1\u03b9\u03c1\u03b5\u03c4\u03b9\u03ba\u03ac \u03bb\u03b5\u03c0\u03c4\u03ae \u03ba\u03b1\u03c4\u03b1\u03bd\u03bf\u03bc\u03ae \u03bc\u03b5\u03b3\u03ad\u03b8\u03bf\u03c5\u03c2 \u03c3\u03c9\u03bc\u03b1\u03c4\u03b9\u03b4\u03af\u03c9\u03bd \u03bc\u03b5 \u03c4\u03b7 \u03c7\u03c1\u03ae\u03c3\u03b7 \u03bc\u03cd\u03bb\u03bf\u03c5 \u03c5\u03c8\u03b7\u03bb\u03ae\u03c2 \u03b1\u03c0\u03cc\u03b4\u03bf\u03c3\u03b7\u03c2, \u03b5\u03c0\u03b9\u03c4\u03c1\u03ad\u03c0\u03bf\u03bd\u03c4\u03b1\u03c2 \u03c0\u03b9\u03bf \u03c3\u03c6\u03b9\u03c7\u03c4\u03ac \u03c3\u03c5\u03c3\u03ba\u03b5\u03c5\u03b1\u03c3\u03bc\u03ad\u03bd\u03b5\u03c2 \u03ba\u03b5\u03c1\u03b1\u03bc\u03b9\u03ba\u03ad\u03c2 \u03b4\u03bf\u03bc\u03ad\u03c2. \u0391\u03c5\u03c4\u03cc \u03b4\u03b7\u03bc\u03b9\u03bf\u03c5\u03c1\u03b3\u03b5\u03af \u03c0\u03c5\u03ba\u03bd\u03ad\u03c2 \u03ba\u03b5\u03c1\u03b1\u03bc\u03b9\u03ba\u03ad\u03c2 \u03b4\u03bf\u03bc\u03ad\u03c2 \u03bc\u03b5 \u03b5\u03be\u03b1\u03b9\u03c1\u03b5\u03c4\u03b9\u03ba\u03ad\u03c2 \u03b8\u03b5\u03c1\u03bc\u03bf\u03bc\u03bf\u03bd\u03c9\u03c4\u03b9\u03ba\u03ad\u03c2 \u03b9\u03b4\u03b9\u03cc\u03c4\u03b7\u03c4\u03b5\u03c2.<\/p>\n

\u0397 \u03b1\u03bd\u03ce\u03c4\u03b5\u03c1\u03b7 \u03b8\u03b5\u03c1\u03bc\u03b9\u03ba\u03ae \u03ba\u03b1\u03b9 \u03b7\u03bb\u03b5\u03ba\u03c4\u03c1\u03b9\u03ba\u03ae \u03bc\u03cc\u03bd\u03c9\u03c3\u03b7 \u03c4\u03bf\u03c5 \u03bd\u03b9\u03c4\u03c1\u03b9\u03b4\u03af\u03bf\u03c5 \u03c4\u03bf\u03c5 \u03b1\u03bb\u03bf\u03c5\u03bc\u03b9\u03bd\u03af\u03bf\u03c5 \u03c4\u03bf \u03ba\u03b1\u03b8\u03b9\u03c3\u03c4\u03bf\u03cd\u03bd \u03b5\u03be\u03b1\u03b9\u03c1\u03b5\u03c4\u03b9\u03ba\u03cc \u03c5\u03bb\u03b9\u03ba\u03cc \u03b3\u03b9\u03b1 \u03b5\u03c6\u03b1\u03c1\u03bc\u03bf\u03b3\u03ad\u03c2 MEMS, \u03cc\u03c0\u03c9\u03c2 \u03c6\u03af\u03bb\u03c4\u03c1\u03b1 \u03c5\u03c8\u03b7\u03bb\u03ae\u03c2 \u03c3\u03c5\u03c7\u03bd\u03cc\u03c4\u03b7\u03c4\u03b1\u03c2, \u03c3\u03c5\u03bb\u03bb\u03ad\u03ba\u03c4\u03b5\u03c2 \u03b5\u03bd\u03ad\u03c1\u03b3\u03b5\u03b9\u03b1\u03c2 \u03ba\u03b1\u03b9 \u03bc\u03b5\u03c4\u03b1\u03c4\u03c1\u03bf\u03c0\u03b5\u03af\u03c2 \u03c5\u03c0\u03b5\u03c1\u03ae\u03c7\u03c9\u03bd. \u0395\u03c0\u03b9\u03c0\u03bb\u03ad\u03bf\u03bd, \u03c4\u03bf \u03b5\u03c5\u03c1\u03cd \u03c7\u03ac\u03c3\u03bc\u03b1 \u03b6\u03ce\u03bd\u03b7\u03c2, \u03b7 \u03c3\u03c5\u03bc\u03b2\u03b1\u03c4\u03cc\u03c4\u03b7\u03c4\u03b1 \u03bc\u03b5 \u03c4\u03b7\u03bd \u03c4\u03b5\u03c7\u03bd\u03bf\u03bb\u03bf\u03b3\u03af\u03b1 \u03c3\u03c5\u03bc\u03c0\u03bb\u03b7\u03c1\u03c9\u03bc\u03b1\u03c4\u03b9\u03ba\u03ce\u03bd \u03b7\u03bc\u03b9\u03b1\u03b3\u03c9\u03b3\u03ce\u03bd \u03bf\u03be\u03b5\u03b9\u03b4\u03af\u03bf\u03c5 \u03bc\u03b5\u03c4\u03ac\u03bb\u03bb\u03bf\u03c5 (CMOS) \u03ba\u03b1\u03b9 \u03bf\u03b9 \u03b1\u03bd\u03ce\u03c4\u03b5\u03c1\u03b5\u03c2 \u03c0\u03b9\u03b5\u03b6\u03bf\u03b7\u03bb\u03b5\u03ba\u03c4\u03c1\u03b9\u03ba\u03ad\u03c2 \u03b9\u03b4\u03b9\u03cc\u03c4\u03b7\u03c4\u03b5\u03c2 \u03ba\u03b1\u03b8\u03b9\u03c3\u03c4\u03bf\u03cd\u03bd \u03c4\u03bf \u03c5\u03bb\u03b9\u03ba\u03cc \u03b1\u03c5\u03c4\u03cc \u03ba\u03b1\u03c4\u03ac\u03bb\u03bb\u03b7\u03bb\u03bf \u03b3\u03b9\u03b1 \u03c0\u03bf\u03bb\u03bb\u03ad\u03c2 \u03c3\u03c5\u03c3\u03ba\u03b5\u03c5\u03ad\u03c2 MEMS, \u03cc\u03c0\u03c9\u03c2 \u03c6\u03af\u03bb\u03c4\u03c1\u03b1 \u03c5\u03c8\u03b7\u03bb\u03ae\u03c2 \u03c3\u03c5\u03c7\u03bd\u03cc\u03c4\u03b7\u03c4\u03b1\u03c2, \u03c3\u03c5\u03bb\u03bb\u03ad\u03ba\u03c4\u03b5\u03c2 \u03b5\u03bd\u03ad\u03c1\u03b3\u03b5\u03b9\u03b1\u03c2 \u03ba\u03b1\u03b9 \u03bc\u03b5\u03c4\u03b1\u03c4\u03c1\u03bf\u03c0\u03b5\u03af\u03c2 \u03c5\u03c0\u03b5\u03c1\u03ae\u03c7\u03c9\u03bd. \u0395\u03c0\u03b9\u03c0\u03bb\u03ad\u03bf\u03bd, \u03bf\u03b9 \u03bc\u03b7\u03c7\u03b1\u03bd\u03b9\u03ba\u03ad\u03c2 \u03c4\u03bf\u03c5 \u03b9\u03b4\u03b9\u03cc\u03c4\u03b7\u03c4\u03b5\u03c2 \u03b5\u03c0\u03b9\u03c4\u03c1\u03ad\u03c0\u03bf\u03c5\u03bd \u03c4\u03b7\u03bd \u03b5\u03cd\u03ba\u03bf\u03bb\u03b7 \u03b4\u03b9\u03b1\u03bc\u03cc\u03c1\u03c6\u03c9\u03c3\u03ae \u03c4\u03bf\u03c5.<\/p>\n

\u03a5\u03c8\u03b7\u03bb\u03ae \u03b7\u03bb\u03b5\u03ba\u03c4\u03c1\u03b9\u03ba\u03ae \u03bc\u03cc\u03bd\u03c9\u03c3\u03b7<\/h2>\n

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\u03a4\u03bf \u03ba\u03b5\u03c1\u03b1\u03bc\u03b9\u03ba\u03cc \u03ad\u03c7\u03b5\u03b9 \u03c5\u03c8\u03b7\u03bb\u03cc\u03c4\u03b5\u03c1\u03b7 \u03b8\u03b5\u03c1\u03bc\u03b9\u03ba\u03ae \u03b1\u03b3\u03c9\u03b3\u03b9\u03bc\u03cc\u03c4\u03b7\u03c4\u03b1 \u03ba\u03b1\u03b9 \u03c0\u03c5\u03ba\u03bd\u03cc\u03c4\u03b7\u03c4\u03b1 \u03b1\u03c0\u03cc \u03c4\u03b1 \u03b1\u03bd\u03c4\u03af\u03c3\u03c4\u03bf\u03b9\u03c7\u03b1 \u03c5\u03bb\u03b9\u03ba\u03ac \u03b1\u03bb\u03bf\u03c5\u03bc\u03af\u03bd\u03b1\u03c2 \u03ba\u03b1\u03b9 \u03b2\u03b7\u03c1\u03c5\u03bb\u03bb\u03af\u03b1\u03c2, \u03b5\u03bd\u03ce \u03b4\u03b9\u03b1\u03b8\u03ad\u03c4\u03b5\u03b9 \u03c7\u03b1\u03bc\u03b7\u03bb\u03cc\u03c4\u03b5\u03c1\u03bf \u03c3\u03c5\u03bd\u03c4\u03b5\u03bb\u03b5\u03c3\u03c4\u03ae \u03b4\u03b9\u03b1\u03c3\u03c4\u03bf\u03bb\u03ae\u03c2 \u03b1\u03c0\u03cc \u03c4\u03b7\u03bd \u03b1\u03bb\u03bf\u03c5\u03bc\u03af\u03bd\u03b1 \u03b3\u03b9\u03b1 \u03b5\u03c6\u03b1\u03c1\u03bc\u03bf\u03b3\u03ad\u03c2 \u03c5\u03c8\u03b7\u03bb\u03cc\u03c4\u03b5\u03c1\u03c9\u03bd \u03b8\u03b5\u03c1\u03bc\u03bf\u03ba\u03c1\u03b1\u03c3\u03b9\u03ce\u03bd \u03ba\u03b1\u03b9 \u03b1\u03bd\u03ce\u03c4\u03b5\u03c1\u03b7 \u03b1\u03bd\u03c4\u03bf\u03c7\u03ae \u03c3\u03c4\u03b7 \u03b4\u03b9\u03ac\u03b2\u03c1\u03c9\u03c3\u03b7 \u03c0\u03bb\u03ac\u03c3\u03bc\u03b1\u03c4\u03bf\u03c2 \u03b1\u03c0\u03cc \u03c4\u03b1 \u03c0\u03b5\u03c1\u03b9\u03c3\u03c3\u03cc\u03c4\u03b5\u03c1\u03b1 \u03bc\u03ad\u03c4\u03b1\u03bb\u03bb\u03b1.<\/p>\n

\u03a4\u03bf \u03bd\u03b9\u03c4\u03c1\u03af\u03b4\u03b9\u03bf \u03c4\u03bf\u03c5 \u03b1\u03bb\u03bf\u03c5\u03bc\u03b9\u03bd\u03af\u03bf\u03c5 \u03be\u03b5\u03c7\u03c9\u03c1\u03af\u03b6\u03b5\u03b9 \u03c9\u03c2 \u03bc\u03b9\u03b1 \u03b5\u03bb\u03ba\u03c5\u03c3\u03c4\u03b9\u03ba\u03ae \u03b5\u03c0\u03b9\u03bb\u03bf\u03b3\u03ae \u03c3\u03b5 \u03b7\u03bb\u03b5\u03ba\u03c4\u03c1\u03bf\u03bd\u03b9\u03ba\u03ad\u03c2 \u03b5\u03c6\u03b1\u03c1\u03bc\u03bf\u03b3\u03ad\u03c2 \u03bb\u03cc\u03b3\u03c9 \u03c4\u03b7\u03c2 \u03c7\u03b1\u03bc\u03b7\u03bb\u03ae\u03c2 \u03b8\u03b5\u03c1\u03bc\u03b9\u03ba\u03ae\u03c2 \u03b4\u03b9\u03b1\u03c3\u03c4\u03bf\u03bb\u03ae\u03c2 \u03ba\u03b1\u03b9 \u03c4\u03c9\u03bd \u03b5\u03be\u03b1\u03b9\u03c1\u03b5\u03c4\u03b9\u03ba\u03ce\u03bd \u03b9\u03b4\u03b9\u03bf\u03c4\u03ae\u03c4\u03c9\u03bd \u03b7\u03bb\u03b5\u03ba\u03c4\u03c1\u03b9\u03ba\u03ae\u03c2 \u03bc\u03cc\u03bd\u03c9\u03c3\u03b7\u03c2, \u03c0\u03b1\u03c1\u03ad\u03c7\u03bf\u03bd\u03c4\u03b1\u03c2 \u03bc\u03b9\u03b1 \u03b5\u03bd\u03b1\u03bb\u03bb\u03b1\u03ba\u03c4\u03b9\u03ba\u03ae \u03b5\u03c0\u03b9\u03bb\u03bf\u03b3\u03ae \u03ad\u03bd\u03b1\u03bd\u03c4\u03b9 \u03c4\u03b7\u03c2 \u03b2\u03b7\u03c1\u03c5\u03bb\u03bb\u03af\u03b1\u03c2 \u03c3\u03b5 \u03bf\u03c1\u03b9\u03c3\u03bc\u03ad\u03bd\u03b5\u03c2 \u03c0\u03b5\u03c1\u03b9\u03c0\u03c4\u03ce\u03c3\u03b5\u03b9\u03c2. \u0397 \u03c7\u03b1\u03bc\u03b7\u03bb\u03cc\u03c4\u03b5\u03c1\u03b7 \u03c0\u03c5\u03ba\u03bd\u03cc\u03c4\u03b7\u03c4\u03b1 \u03ba\u03b1\u03b9 \u03bf\u03b9 \u03b7\u03bb\u03b5\u03ba\u03c4\u03c1\u03b9\u03ba\u03ad\u03c2 \u03c4\u03bf\u03c5 \u03b9\u03b4\u03b9\u03cc\u03c4\u03b7\u03c4\u03b5\u03c2 \u03ba\u03b1\u03b8\u03b9\u03c3\u03c4\u03bf\u03cd\u03bd \u03c4\u03bf \u03bd\u03b9\u03c4\u03c1\u03af\u03b4\u03b9\u03bf \u03c4\u03bf\u03c5 \u03b1\u03bb\u03bf\u03c5\u03bc\u03b9\u03bd\u03af\u03bf\u03c5 \u03ad\u03bd\u03b1 \u03b9\u03b4\u03b9\u03b1\u03af\u03c4\u03b5\u03c1\u03b1 \u03ba\u03b1\u03c4\u03ac\u03bb\u03bb\u03b7\u03bb\u03bf \u03c5\u03bb\u03b9\u03ba\u03cc \u03b3\u03b9\u03b1 \u03b5\u03be\u03b1\u03c1\u03c4\u03ae\u03bc\u03b1\u03c4\u03b1 \u03c0\u03bf\u03c5 \u03b1\u03c0\u03b1\u03b9\u03c4\u03bf\u03cd\u03bd \u03c3\u03c4\u03b5\u03bd\u03ad\u03c2 \u03b1\u03bd\u03bf\u03c7\u03ad\u03c2, \u03cc\u03c0\u03c9\u03c2 \u03b5\u03be\u03b1\u03c1\u03c4\u03ae\u03bc\u03b1\u03c4\u03b1 \u03c1\u03b1\u03b4\u03b9\u03bf\u03c3\u03c5\u03c7\u03bd\u03bf\u03c4\u03ae\u03c4\u03c9\u03bd.<\/p>\n

\u03a4\u03bf \u03bd\u03b9\u03c4\u03c1\u03af\u03b4\u03b9\u03bf \u03c4\u03bf\u03c5 \u03b1\u03c1\u03b3\u03b9\u03bb\u03af\u03bf\u03c5 (AlN) \u03b5\u03af\u03bd\u03b1\u03b9 \u03ad\u03bd\u03b1 \u03b5\u03bb\u03ba\u03c5\u03c3\u03c4\u03b9\u03ba\u03cc \u03c5\u03bb\u03b9\u03ba\u03cc \u03b3\u03b9\u03b1 \u03b5\u03c6\u03b1\u03c1\u03bc\u03bf\u03b3\u03ad\u03c2 \u03bc\u03b9\u03ba\u03c1\u03bf\u03b7\u03bb\u03b5\u03ba\u03c4\u03c1\u03bf\u03bc\u03b7\u03c7\u03b1\u03bd\u03b9\u03ba\u03ce\u03bd \u03c3\u03c5\u03c3\u03c4\u03b7\u03bc\u03ac\u03c4\u03c9\u03bd (MEMS), \u03cc\u03c0\u03c9\u03c2 \u03c6\u03af\u03bb\u03c4\u03c1\u03b1 \u03c5\u03c8\u03b7\u03bb\u03ce\u03bd \u03c3\u03c5\u03c7\u03bd\u03bf\u03c4\u03ae\u03c4\u03c9\u03bd \u03ba\u03b1\u03b9 \u03c3\u03c5\u03bb\u03bb\u03ad\u03ba\u03c4\u03b5\u03c2 \u03b5\u03bd\u03ad\u03c1\u03b3\u03b5\u03b9\u03b1\u03c2, \u03ba\u03b1\u03b8\u03ce\u03c2 \u03b4\u03b9\u03b1\u03b8\u03ad\u03c4\u03b5\u03b9 \u03b5\u03c5\u03c1\u03cd \u03c7\u03ac\u03c3\u03bc\u03b1 \u03b6\u03ce\u03bd\u03b7\u03c2 \u03ba\u03b1\u03b9 \u03c0\u03b9\u03b5\u03b6\u03bf\u03b7\u03bb\u03b5\u03ba\u03c4\u03c1\u03b9\u03ba\u03ad\u03c2 \u03b9\u03b4\u03b9\u03cc\u03c4\u03b7\u03c4\u03b5\u03c2 \u03c3\u03c5\u03bc\u03b2\u03b1\u03c4\u03ad\u03c2 \u03bc\u03b5 \u03c4\u03b7\u03bd \u03c4\u03b5\u03c7\u03bd\u03bf\u03bb\u03bf\u03b3\u03af\u03b1 \u03c3\u03c5\u03bc\u03c0\u03bb\u03b7\u03c1\u03c9\u03bc\u03b1\u03c4\u03b9\u03ba\u03ce\u03bd \u03b7\u03bc\u03b9\u03b1\u03b3\u03c9\u03b3\u03ce\u03bd \u03bf\u03be\u03b5\u03b9\u03b4\u03af\u03bf\u03c5 \u03bc\u03b5\u03c4\u03ac\u03bb\u03bb\u03bf\u03c5 (CMOS). \u0395\u03c0\u03b9\u03c0\u03bb\u03ad\u03bf\u03bd, \u03c4\u03bf AlN \u03bc\u03c0\u03bf\u03c1\u03b5\u03af \u03bd\u03b1 \u03ba\u03b1\u03c4\u03b5\u03c1\u03b3\u03b1\u03c3\u03c4\u03b5\u03af \u03b5\u03cd\u03ba\u03bf\u03bb\u03b1 \u03bb\u03cc\u03b3\u03c9 \u03c4\u03bf\u03c5 \u03c7\u03b1\u03bc\u03b7\u03bb\u03bf\u03cd \u03c3\u03b7\u03bc\u03b5\u03af\u03bf\u03c5 \u03c4\u03ae\u03be\u03b7\u03c2 \u03c4\u03bf\u03c5. \u03a9\u03c3\u03c4\u03cc\u03c3\u03bf, \u03c4\u03b1 \u03c0\u03bf\u03c3\u03bf\u03c3\u03c4\u03ac \u03c3\u03c5\u03c1\u03c1\u03af\u03ba\u03bd\u03c9\u03c3\u03ae\u03c2 \u03c4\u03bf\u03c5 \u03bc\u03b5\u03c4\u03ac \u03c4\u03b7\u03bd \u03c0\u03c5\u03c1\u03bf\u03c3\u03c5\u03c3\u03c3\u03c9\u03bc\u03ac\u03c4\u03c9\u03c3\u03b7 \u03bc\u03c0\u03bf\u03c1\u03b5\u03af \u03bd\u03b1 \u03b1\u03c0\u03bf\u03b4\u03b5\u03b9\u03c7\u03b8\u03bf\u03cd\u03bd \u03c0\u03c1\u03cc\u03ba\u03bb\u03b7\u03c3\u03b7 \u03b3\u03b9\u03b1 \u03c4\u03b7 \u03b4\u03b9\u03b1\u03c4\u03ae\u03c1\u03b7\u03c3\u03b7 \u03c3\u03c4\u03b5\u03bd\u03ce\u03bd \u03b1\u03bd\u03bf\u03c7\u03ce\u03bd \u03bc\u03b5 \u03b1\u03c5\u03c4\u03cc \u03c4\u03bf \u03c5\u03bb\u03b9\u03ba\u03cc.<\/p>\n

\u03a5\u03c8\u03b7\u03bb\u03ae \u03bc\u03b7\u03c7\u03b1\u03bd\u03b9\u03ba\u03ae \u03b1\u03bd\u03c4\u03bf\u03c7\u03ae<\/h2>\n

\u03a4\u03bf \u03bd\u03b9\u03c4\u03c1\u03af\u03b4\u03b9\u03bf \u03c4\u03bf\u03c5 \u03b1\u03bb\u03bf\u03c5\u03bc\u03b9\u03bd\u03af\u03bf\u03c5 \u03b4\u03b9\u03b1\u03b8\u03ad\u03c4\u03b5\u03b9 \u03b5\u03be\u03b1\u03b9\u03c1\u03b5\u03c4\u03b9\u03ba\u03ae \u03bc\u03b7\u03c7\u03b1\u03bd\u03b9\u03ba\u03ae \u03b1\u03bd\u03c4\u03bf\u03c7\u03ae, \u03ba\u03b1\u03b8\u03b9\u03c3\u03c4\u03ce\u03bd\u03c4\u03b1\u03c2 \u03c4\u03bf \u03b5\u03be\u03b1\u03b9\u03c1\u03b5\u03c4\u03b9\u03ba\u03cc \u03c5\u03bb\u03b9\u03ba\u03cc \u03b3\u03b9\u03b1 \u03c4\u03b7 \u03b4\u03b7\u03bc\u03b9\u03bf\u03c5\u03c1\u03b3\u03af\u03b1 \u03ba\u03b5\u03c1\u03b1\u03bc\u03b9\u03ba\u03ce\u03bd \u03c5\u03c0\u03bf\u03c3\u03c4\u03c1\u03c9\u03bc\u03ac\u03c4\u03c9\u03bd \u03b3\u03b9\u03b1 \u03b7\u03bc\u03b9\u03b1\u03b3\u03c9\u03b3\u03bf\u03cd\u03c2. \u03a9\u03c2 \u03ad\u03bd\u03b1 \u03b1\u03c0\u03cc \u03c4\u03b1 \u03b9\u03c3\u03c7\u03c5\u03c1\u03cc\u03c4\u03b5\u03c1\u03b1 \u03ba\u03b5\u03c1\u03b1\u03bc\u03b9\u03ba\u03ac \u03c5\u03bb\u03b9\u03ba\u03ac \u03c0\u03bf\u03c5 \u03c7\u03c1\u03b7\u03c3\u03b9\u03bc\u03bf\u03c0\u03bf\u03b9\u03bf\u03cd\u03bd\u03c4\u03b1\u03b9 \u03c3\u03ae\u03bc\u03b5\u03c1\u03b1 - \u03bc\u03b5 \u03bc\u03b5\u03b3\u03b1\u03bb\u03cd\u03c4\u03b5\u03c1\u03b7 \u03b1\u03bd\u03c4\u03bf\u03c7\u03ae \u03c3\u03b5 \u03ba\u03ac\u03bc\u03c8\u03b7 \u03c4\u03cc\u03c3\u03bf \u03b1\u03c0\u03cc \u03c4\u03bf \u03ba\u03b1\u03c1\u03b2\u03af\u03b4\u03b9\u03bf \u03c4\u03bf\u03c5 \u03c0\u03c5\u03c1\u03b9\u03c4\u03af\u03bf\u03c5 \u03cc\u03c3\u03bf \u03ba\u03b1\u03b9 \u03b1\u03c0\u03cc \u03c4\u03bf \u03bf\u03be\u03b5\u03af\u03b4\u03b9\u03bf \u03c4\u03bf\u03c5 \u03b1\u03bb\u03bf\u03c5\u03bc\u03b9\u03bd\u03af\u03bf\u03c5 - \u03ba\u03b1\u03b9 \u03bb\u03cc\u03b3\u03c9 \u03c4\u03c9\u03bd \u03b5\u03be\u03b1\u03b9\u03c1\u03b5\u03c4\u03b9\u03ba\u03ce\u03bd \u03b9\u03b4\u03b9\u03bf\u03c4\u03ae\u03c4\u03c9\u03bd \u03b8\u03b5\u03c1\u03bc\u03b9\u03ba\u03ae\u03c2 \u03b1\u03b3\u03c9\u03b3\u03b9\u03bc\u03cc\u03c4\u03b7\u03c4\u03b1\u03c2 \u03c0\u03c1\u03bf\u03c3\u03c6\u03ad\u03c1\u03b5\u03b9 \u03b5\u03c0\u03af\u03c3\u03b7\u03c2 \u03b5\u03be\u03b1\u03b9\u03c1\u03b5\u03c4\u03b9\u03ba\u03ad\u03c2 \u03b7\u03bb\u03b5\u03ba\u03c4\u03c1\u03b9\u03ba\u03ad\u03c2 \u03bc\u03bf\u03bd\u03c9\u03c4\u03b9\u03ba\u03ad\u03c2 \u03b9\u03b4\u03b9\u03cc\u03c4\u03b7\u03c4\u03b5\u03c2.<\/p>\n

\u039f \u03bc\u03bf\u03bd\u03b1\u03b4\u03b9\u03ba\u03cc\u03c2 \u03c3\u03c5\u03bd\u03b4\u03c5\u03b1\u03c3\u03bc\u03cc\u03c2 \u03b9\u03b4\u03b9\u03bf\u03c4\u03ae\u03c4\u03c9\u03bd \u03c4\u03bf\u03c5 \u03bd\u03b9\u03c4\u03c1\u03b9\u03b4\u03af\u03bf\u03c5 \u03c4\u03bf\u03c5 \u03b1\u03bb\u03bf\u03c5\u03bc\u03b9\u03bd\u03af\u03bf\u03c5 \u03c4\u03bf \u03ba\u03b1\u03b8\u03b9\u03c3\u03c4\u03ac \u03b9\u03b4\u03b1\u03bd\u03b9\u03ba\u03cc \u03b3\u03b9\u03b1 \u03b5\u03c6\u03b1\u03c1\u03bc\u03bf\u03b3\u03ad\u03c2 \u03b9\u03c3\u03c7\u03cd\u03bf\u03c2 \u03ba\u03b1\u03b9 \u03bc\u03b9\u03ba\u03c1\u03bf\u03b7\u03bb\u03b5\u03ba\u03c4\u03c1\u03bf\u03bd\u03b9\u03ba\u03ae\u03c2 \u03ba\u03b1\u03b9 \u03c3\u03c5\u03c7\u03bd\u03ac \u03c7\u03c1\u03b7\u03c3\u03b9\u03bc\u03b5\u03cd\u03b5\u03b9 \u03c9\u03c2 \u03b5\u03bd\u03b1\u03bb\u03bb\u03b1\u03ba\u03c4\u03b9\u03ba\u03ae \u03bb\u03cd\u03c3\u03b7 \u03b3\u03b9\u03b1 \u03c4\u03bf \u03bf\u03be\u03b5\u03af\u03b4\u03b9\u03bf \u03c4\u03bf\u03c5 \u03b2\u03b7\u03c1\u03c5\u03bb\u03bb\u03af\u03bf\u03c5 \u03c3\u03c4\u03b1 \u03b7\u03bb\u03b5\u03ba\u03c4\u03c1\u03bf\u03bd\u03b9\u03ba\u03ac, \u03bb\u03cc\u03b3\u03c9 \u03c4\u03c9\u03bd \u03ba\u03b9\u03bd\u03b4\u03cd\u03bd\u03c9\u03bd \u03b3\u03b9\u03b1 \u03c4\u03b7\u03bd \u03c5\u03b3\u03b5\u03af\u03b1 \u03c0\u03bf\u03c5 \u03c3\u03c5\u03bd\u03b4\u03ad\u03bf\u03bd\u03c4\u03b1\u03b9 \u03bc\u03b5 \u03c4\u03bf \u03c7\u03b5\u03b9\u03c1\u03b9\u03c3\u03bc\u03cc \u03c4\u03bf\u03c5 BeO. \u0395\u03c0\u03b9\u03c0\u03bb\u03ad\u03bf\u03bd, \u03c4\u03bf \u03bd\u03b9\u03c4\u03c1\u03af\u03b4\u03b9\u03bf \u03c4\u03bf\u03c5 \u03b1\u03bb\u03bf\u03c5\u03bc\u03b9\u03bd\u03af\u03bf\u03c5 \u03b4\u03b9\u03b1\u03b8\u03ad\u03c4\u03b5\u03b9 \u03c0\u03bf\u03bb\u03cd \u03c7\u03b1\u03bc\u03b7\u03bb\u03cc\u03c4\u03b5\u03c1\u03bf \u03c3\u03c5\u03bd\u03c4\u03b5\u03bb\u03b5\u03c3\u03c4\u03ae \u03b8\u03b5\u03c1\u03bc\u03b9\u03ba\u03ae\u03c2 \u03b4\u03b9\u03b1\u03c3\u03c4\u03bf\u03bb\u03ae\u03c2 \u03c3\u03b5 \u03c3\u03cd\u03b3\u03ba\u03c1\u03b9\u03c3\u03b7 \u03c4\u03cc\u03c3\u03bf \u03bc\u03b5 \u03c4\u03b7\u03bd \u03b1\u03bb\u03bf\u03c5\u03bc\u03af\u03bd\u03b1 \u03cc\u03c3\u03bf \u03ba\u03b1\u03b9 \u03bc\u03b5 \u03c4\u03bf \u03bf\u03be\u03b5\u03af\u03b4\u03b9\u03bf \u03c4\u03bf\u03c5 \u03b2\u03b7\u03c1\u03c5\u03bb\u03bb\u03af\u03bf\u03c5, \u03b3\u03b5\u03b3\u03bf\u03bd\u03cc\u03c2 \u03c0\u03bf\u03c5 \u03c4\u03bf \u03ba\u03b1\u03b8\u03b9\u03c3\u03c4\u03ac \u03ba\u03b1\u03c4\u03ac\u03bb\u03bb\u03b7\u03bb\u03bf \u03b3\u03b9\u03b1 \u03b5\u03c6\u03b1\u03c1\u03bc\u03bf\u03b3\u03ad\u03c2 \u03c0\u03bf\u03c5 \u03b1\u03c0\u03b1\u03b9\u03c4\u03bf\u03cd\u03bd \u03bb\u03b5\u03b9\u03c4\u03bf\u03c5\u03c1\u03b3\u03af\u03b1 \u03c3\u03b5 \u03c7\u03b1\u03bc\u03b7\u03bb\u03ad\u03c2 \u03b8\u03b5\u03c1\u03bc\u03bf\u03ba\u03c1\u03b1\u03c3\u03af\u03b5\u03c2.<\/p>\n

\u039f\u03b9 \u03c0\u03c1\u03cc\u03c3\u03c6\u03b1\u03c4\u03b5\u03c2 \u03b5\u03be\u03b5\u03bb\u03af\u03be\u03b5\u03b9\u03c2 \u03c3\u03c4\u03b7\u03bd \u03c4\u03b5\u03c7\u03bd\u03bf\u03bb\u03bf\u03b3\u03af\u03b1 \u03c4\u03c9\u03bd \u03b7\u03bc\u03b9\u03b1\u03b3\u03c9\u03b3\u03ce\u03bd \u03b9\u03c3\u03c7\u03cd\u03bf\u03c2 \u03ad\u03c7\u03bf\u03c5\u03bd \u03b4\u03b7\u03bc\u03b9\u03bf\u03c5\u03c1\u03b3\u03ae\u03c3\u03b5\u03b9 \u03b1\u03c5\u03be\u03b7\u03bc\u03ad\u03bd\u03b7 \u03b1\u03bd\u03ac\u03b3\u03ba\u03b7 \u03b3\u03b9\u03b1 \u03b5\u03bd\u03b1\u03bb\u03bb\u03b1\u03ba\u03c4\u03b9\u03ba\u03ac \u03c5\u03bb\u03b9\u03ba\u03ac \u03c0\u03bf\u03c5 \u03bc\u03c0\u03bf\u03c1\u03bf\u03cd\u03bd \u03bd\u03b1 \u03b4\u03b9\u03b1\u03c7\u03ad\u03bf\u03c5\u03bd \u03b1\u03c0\u03bf\u03c4\u03b5\u03bb\u03b5\u03c3\u03bc\u03b1\u03c4\u03b9\u03ba\u03ac \u03c4\u03b7 \u03b8\u03b5\u03c1\u03bc\u03cc\u03c4\u03b7\u03c4\u03b1. \u03a4\u03b1 \u03c0\u03b1\u03c1\u03b1\u03b4\u03bf\u03c3\u03b9\u03b1\u03ba\u03ac \u03ba\u03b5\u03c1\u03b1\u03bc\u03b9\u03ba\u03ac \u03c5\u03bb\u03b9\u03ba\u03ac \u03c5\u03c0\u03bf\u03c3\u03c4\u03c1\u03ce\u03bc\u03b1\u03c4\u03bf\u03c2, \u03cc\u03c0\u03c9\u03c2 \u03c4\u03bf \u03bf\u03be\u03b5\u03af\u03b4\u03b9\u03bf \u03c4\u03bf\u03c5 \u03b1\u03bb\u03bf\u03c5\u03bc\u03b9\u03bd\u03af\u03bf\u03c5 (Al2O3) \u03ba\u03b1\u03b9 \u03c4\u03bf \u03bd\u03b9\u03c4\u03c1\u03af\u03b4\u03b9\u03bf \u03c4\u03bf\u03c5 \u03c0\u03c5\u03c1\u03b9\u03c4\u03af\u03bf\u03c5 (Si3N4), \u03ad\u03c7\u03bf\u03c5\u03bd \u03b1\u03c0\u03bf\u03b4\u03b5\u03b9\u03c7\u03b8\u03b5\u03af \u03b1\u03bd\u03b5\u03c0\u03b1\u03c1\u03ba\u03ae \u03b1\u03c0\u03cc \u03c4\u03b7\u03bd \u03ac\u03c0\u03bf\u03c8\u03b7 \u03b1\u03c5\u03c4\u03ae, \u03bf\u03c0\u03cc\u03c4\u03b5 \u03c4\u03bf AlGalN \u03ad\u03c7\u03b5\u03b9 \u03b1\u03bd\u03b1\u03b4\u03b5\u03b9\u03c7\u03b8\u03b5\u03af \u03c9\u03c2 \u03c0\u03b9\u03b8\u03b1\u03bd\u03cc\u03c2 \u03c5\u03c0\u03bf\u03c8\u03ae\u03c6\u03b9\u03bf\u03c2 \u03bb\u03cc\u03b3\u03c9 \u03c4\u03b7\u03c2 \u03b1\u03bd\u03ce\u03c4\u03b5\u03c1\u03b7\u03c2 \u03b8\u03b5\u03c1\u03bc\u03b9\u03ba\u03ae\u03c2 \u03b1\u03b3\u03c9\u03b3\u03b9\u03bc\u03cc\u03c4\u03b7\u03c4\u03ac\u03c2 \u03c4\u03bf\u03c5.<\/p>\n

\u0394\u03c5\u03c3\u03c4\u03c5\u03c7\u03ce\u03c2, \u03b7 \u03bc\u03b5\u03c4\u03ac\u03b2\u03b1\u03c3\u03b7 \u03b1\u03c0\u03cc \u03c4\u03b7\u03bd \u03b1\u03bb\u03bf\u03c5\u03bc\u03af\u03bd\u03b1 \u03c3\u03c4\u03bf AlGalN \u03b1\u03c0\u03b1\u03b9\u03c4\u03b5\u03af \u03b5\u03ba\u03c4\u03b5\u03c4\u03b1\u03bc\u03ad\u03bd\u03b7 \u03ba\u03b1\u03c4\u03b5\u03c1\u03b3\u03b1\u03c3\u03af\u03b1 \u03c3\u03b5 \u03b1\u03c4\u03bc\u03cc\u03c3\u03c6\u03b1\u03b9\u03c1\u03b1 \u03b1\u03b6\u03ce\u03c4\u03bf\u03c5 \u03bc\u03b5 \u03bc\u03b5\u03b3\u03ac\u03bb\u03bf\u03c5\u03c2 \u03c7\u03c1\u03cc\u03bd\u03bf\u03c5\u03c2 \u03c0\u03b1\u03c1\u03ac\u03b4\u03bf\u03c3\u03b7\u03c2 \u03b3\u03b9\u03b1 \u03bf\u03c1\u03b9\u03c3\u03bc\u03ad\u03bd\u03bf\u03c5\u03c2 \u03ba\u03b1\u03c4\u03b1\u03c3\u03ba\u03b5\u03c5\u03b1\u03c3\u03c4\u03ad\u03c2. \u0393\u03b9\u03b1 \u03bd\u03b1 \u03be\u03b5\u03c0\u03b5\u03c1\u03b1\u03c3\u03c4\u03b5\u03af \u03b1\u03c5\u03c4\u03cc \u03c4\u03bf \u03b5\u03bc\u03c0\u03cc\u03b4\u03b9\u03bf, \u03bf\u03c1\u03b9\u03c3\u03bc\u03ad\u03bd\u03b5\u03c2 \u03b5\u03c4\u03b1\u03b9\u03c1\u03b5\u03af\u03b5\u03c2 \u03ad\u03c7\u03bf\u03c5\u03bd \u03b1\u03bd\u03b1\u03c0\u03c4\u03cd\u03be\u03b5\u03b9 \u03c0\u03c1\u03bf\u03ca\u03cc\u03bd\u03c4\u03b1 AlN \u03bc\u03b5 \u03b4\u03c5\u03bd\u03b1\u03c4\u03cc\u03c4\u03b7\u03c4\u03b1 \u03ba\u03b1\u03c4\u03b5\u03c1\u03b3\u03b1\u03c3\u03af\u03b1\u03c2 \u03c0\u03bf\u03c5 \u03ba\u03b1\u03c4\u03b1\u03c3\u03ba\u03b5\u03c5\u03ac\u03b6\u03bf\u03bd\u03c4\u03b1\u03b9 \u03c9\u03c2 billets, \u03c4\u03b1 \u03bf\u03c0\u03bf\u03af\u03b1 \u03bc\u03c0\u03bf\u03c1\u03bf\u03cd\u03bd \u03bd\u03b1 \u03ba\u03b1\u03c4\u03b5\u03c1\u03b3\u03b1\u03c3\u03c4\u03bf\u03cd\u03bd \u03c7\u03c9\u03c1\u03af\u03c2 \u03c4\u03b7 \u03c7\u03c1\u03ae\u03c3\u03b7 \u03b5\u03c1\u03b3\u03b1\u03bb\u03b5\u03af\u03c9\u03bd \u03bc\u03b5 \u03b4\u03b9\u03b1\u03bc\u03ac\u03bd\u03c4\u03b9\u03b1 \u03ba\u03b1\u03b9 \u03b5\u03af\u03bd\u03b1\u03b9 \u03c0\u03b9\u03bf \u03bf\u03b9\u03ba\u03bf\u03bd\u03bf\u03bc\u03b9\u03ba\u03ac \u03b1\u03c0\u03bf\u03b4\u03bf\u03c4\u03b9\u03ba\u03ac \u03b1\u03c0\u03cc \u03c4\u03bf \u03ba\u03b1\u03b8\u03b1\u03c1\u03cc AlN. \u0391\u03c5\u03c4\u03ac \u03c4\u03b1 \u03ba\u03b1\u03c4\u03b5\u03c1\u03b3\u03ac\u03c3\u03b9\u03bc\u03b1 \u03c0\u03c1\u03bf\u03ca\u03cc\u03bd\u03c4\u03b1 \u03bc\u03c0\u03bf\u03c1\u03bf\u03cd\u03bd \u03b5\u03c0\u03af\u03c3\u03b7\u03c2 \u03bd\u03b1 \u03c0\u03c1\u03bf\u03bc\u03b7\u03b8\u03b5\u03c5\u03c4\u03bf\u03cd\u03bd \u03b1\u03c0\u03cc \u03c0\u03bf\u03bb\u03bb\u03bf\u03cd\u03c2 \u03c0\u03c1\u03bf\u03bc\u03b7\u03b8\u03b5\u03c5\u03c4\u03ad\u03c2, \u03b3\u03b5\u03b3\u03bf\u03bd\u03cc\u03c2 \u03c0\u03bf\u03c5 \u03bc\u03b5\u03b9\u03ce\u03bd\u03b5\u03b9 \u03b1\u03ba\u03cc\u03bc\u03b7 \u03c0\u03b5\u03c1\u03b9\u03c3\u03c3\u03cc\u03c4\u03b5\u03c1\u03bf \u03c4\u03bf\u03c5\u03c2 \u03c7\u03c1\u03cc\u03bd\u03bf\u03c5\u03c2 \u03c0\u03b1\u03c1\u03ac\u03b4\u03bf\u03c3\u03b7\u03c2.<\/p>\n

\u03a5\u03c8\u03b7\u03bb\u03ae \u03b1\u03bd\u03c4\u03bf\u03c7\u03ae \u03c3\u03c4\u03b7\u03bd \u03bf\u03be\u03b5\u03af\u03b4\u03c9\u03c3\u03b7<\/h2>\n

\u03a4\u03bf \u03bd\u03b9\u03c4\u03c1\u03af\u03b4\u03b9\u03bf \u03c4\u03bf\u03c5 \u03b1\u03bb\u03bf\u03c5\u03bc\u03b9\u03bd\u03af\u03bf\u03c5 (AlN) \u03b5\u03af\u03bd\u03b1\u03b9 \u03ad\u03bd\u03b1 \u03c3\u03c4\u03b5\u03c1\u03b5\u03cc \u03bd\u03b9\u03c4\u03c1\u03af\u03b4\u03b9\u03bf \u03c4\u03bf\u03c5 \u03b1\u03bb\u03bf\u03c5\u03bc\u03b9\u03bd\u03af\u03bf\u03c5 \u03bc\u03b5 \u03c5\u03c8\u03b7\u03bb\u03ae \u03b8\u03b5\u03c1\u03bc\u03b9\u03ba\u03ae \u03b1\u03b3\u03c9\u03b3\u03b9\u03bc\u03cc\u03c4\u03b7\u03c4\u03b1 \u03ba\u03b1\u03b9 \u03b5\u03be\u03b1\u03b9\u03c1\u03b5\u03c4\u03b9\u03ba\u03ad\u03c2 \u03b9\u03b4\u03b9\u03cc\u03c4\u03b7\u03c4\u03b5\u03c2 \u03b7\u03bb\u03b5\u03ba\u03c4\u03c1\u03b9\u03ba\u03ae\u03c2 \u03bc\u03cc\u03bd\u03c9\u03c3\u03b7\u03c2. \u0395\u03c0\u03b9\u03c0\u03bb\u03ad\u03bf\u03bd, \u03b7 \u03b1\u03bd\u03c4\u03bf\u03c7\u03ae \u03c4\u03bf\u03c5 AlN \u03c3\u03c4\u03b7\u03bd \u03bf\u03be\u03b5\u03af\u03b4\u03c9\u03c3\u03b7, \u03c4\u03b7\u03bd \u03c4\u03c1\u03b9\u03b2\u03ae \u03ba\u03b1\u03b9 \u03c4\u03b7 \u03b4\u03b9\u03ac\u03b2\u03c1\u03c9\u03c3\u03b7 \u03c4\u03bf \u03c0\u03c1\u03bf\u03c3\u03c4\u03b1\u03c4\u03b5\u03cd\u03b5\u03b9 \u03b1\u03c0\u03cc \u03b2\u03bb\u03ac\u03b2\u03b5\u03c2 \u03b1\u03c0\u03cc \u03c4\u03b7\u03bd \u03c4\u03ae\u03be\u03b7 \u03c4\u03bf\u03c5 \u03b1\u03bb\u03bf\u03c5\u03bc\u03b9\u03bd\u03af\u03bf\u03c5 \u03ba\u03b1\u03b8\u03ce\u03c2 \u03ba\u03b1\u03b9 \u03b1\u03c0\u03cc \u03c4\u03b7 \u03b4\u03b9\u03ac\u03b2\u03c1\u03c9\u03c3\u03b7 \u03c4\u03bf\u03c5 \u03b1\u03c1\u03c3\u03b5\u03bd\u03b9\u03ba\u03bf\u03cd\u03c7\u03bf\u03c5 \u03b3\u03b1\u03bb\u03bb\u03af\u03bf\u03c5- \u03b5\u03c0\u03b9\u03c0\u03bb\u03ad\u03bf\u03bd, \u03b5\u03af\u03bd\u03b1\u03b9 \u03bc\u03b7 \u03c4\u03bf\u03be\u03b9\u03ba\u03cc.<\/p>\n

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\u03a4\u03bf \u03c5\u03bb\u03b9\u03ba\u03cc \u03b1\u03c5\u03c4\u03cc \u03bc\u03c0\u03bf\u03c1\u03b5\u03af \u03bd\u03b1 \u03ba\u03b1\u03c4\u03b5\u03c1\u03b3\u03b1\u03c3\u03c4\u03b5\u03af \u03bc\u03b5 \u03c4\u03b1 \u03c3\u03c5\u03bd\u03ae\u03b8\u03b7 \u03b5\u03c1\u03b3\u03b1\u03bb\u03b5\u03af\u03b1 \u03ba\u03b1\u03c4\u03b5\u03c1\u03b3\u03b1\u03c3\u03af\u03b1\u03c2, \u03c0\u03c1\u03bf\u03c3\u03c6\u03ad\u03c1\u03bf\u03bd\u03c4\u03b1\u03c2 \u03b5\u03be\u03b1\u03b9\u03c1\u03b5\u03c4\u03b9\u03ba\u03ae \u03bc\u03b7\u03c7\u03b1\u03bd\u03b9\u03ba\u03ae \u03b1\u03bd\u03c4\u03bf\u03c7\u03ae \u03ba\u03b1\u03b9 \u03b4\u03c5\u03bd\u03b1\u03c4\u03cc\u03c4\u03b7\u03c4\u03b1 \u03ba\u03b1\u03c4\u03b5\u03c1\u03b3\u03b1\u03c3\u03af\u03b1\u03c2. \u0395\u03c0\u03b9\u03c0\u03bb\u03ad\u03bf\u03bd, \u03b7 \u03c7\u03b1\u03bc\u03b7\u03bb\u03ae \u03c0\u03c5\u03ba\u03bd\u03cc\u03c4\u03b7\u03c4\u03ac \u03c4\u03bf\u03c5 \u03c4\u03bf \u03ba\u03b1\u03b8\u03b9\u03c3\u03c4\u03ac \u03ba\u03b1\u03c4\u03ac\u03bb\u03bb\u03b7\u03bb\u03bf \u03b3\u03b9\u03b1 \u03b5\u03bb\u03b1\u03c6\u03c1\u03b9\u03ac \u03b5\u03be\u03b1\u03c1\u03c4\u03ae\u03bc\u03b1\u03c4\u03b1 \u03ba\u03b1\u03b9 \u03b1\u03b5\u03c1\u03bf\u03b4\u03b9\u03b1\u03c3\u03c4\u03b7\u03bc\u03b9\u03ba\u03ac \u03c5\u03c0\u03bf\u03c3\u03c5\u03c3\u03c4\u03ae\u03bc\u03b1\u03c4\u03b1, \u03b5\u03bd\u03ce \u03b5\u03af\u03bd\u03b1\u03b9 \u03c0\u03b9\u03bf \u03b1\u03bd\u03b8\u03b5\u03ba\u03c4\u03b9\u03ba\u03cc \u03b1\u03c0\u03cc \u03c4\u03bf \u03b3\u03b5\u03bd\u03b9\u03ba\u03cc \u03b1\u03bb\u03bf\u03c5\u03bc\u03af\u03bd\u03b9\u03bf FR-4 \u03ae \u03c4\u03b9\u03c2 \u03c7\u03c5\u03c4\u03cc\u03c7\u03c1\u03c9\u03bc\u03b5\u03c2 \u03c0\u03bb\u03b1\u03ba\u03ad\u03c4\u03b5\u03c2 \u03bc\u03b5 \u03c7\u03b1\u03bb\u03ba\u03cc.<\/p>\n

\u03a4\u03bf \u03b5\u03bb\u03bb\u03b5\u03b9\u03c8\u03cc\u03bc\u03b5\u03c4\u03c1\u03bf Woollam Variable Angle Spectroscopic Ellipsometer (Lincoln, NE USA) \u03c7\u03c1\u03b7\u03c3\u03b9\u03bc\u03bf\u03c0\u03bf\u03b9\u03ae\u03b8\u03b7\u03ba\u03b5 \u03b3\u03b9\u03b1 \u03c4\u03bf\u03bd \u03c7\u03b1\u03c1\u03b1\u03ba\u03c4\u03b7\u03c1\u03b9\u03c3\u03bc\u03cc \u03c4\u03c9\u03bd \u03b4\u03b5\u03b9\u03b3\u03bc\u03ac\u03c4\u03c9\u03bd S1 \u03ba\u03b1\u03b9 S4 AlN\/Si \u03bc\u03b5 \u03b4\u03b9\u03b1\u03c6\u03bf\u03c1\u03b5\u03c4\u03b9\u03ba\u03cc \u03c0\u03ac\u03c7\u03bf\u03c2 \u03c5\u03bc\u03b5\u03bd\u03af\u03bf\u03c5 \u03bc\u03b5 \u03c7\u03c1\u03ae\u03c3\u03b7 \u03b1\u03bd\u03b9\u03c7\u03bd\u03b5\u03c5\u03c4\u03ae XPS, \u03bc\u03b5 \u03c4\u03b7\u03bd \u03b5\u03bd\u03ad\u03c1\u03b3\u03b5\u03b9\u03b1 \u03c3\u03cd\u03bd\u03b4\u03b5\u03c3\u03b7\u03c2 \u03c4\u03b7\u03c2 \u03ba\u03bf\u03c1\u03c5\u03c6\u03ae\u03c2 \u03c6\u03c9\u03c4\u03bf\u03b7\u03bb\u03b5\u03ba\u03c4\u03c1\u03bf\u03bd\u03af\u03c9\u03bd N 1s \u03bd\u03b1 \u03bc\u03b5\u03c4\u03c1\u03ac\u03c4\u03b1\u03b9 \u03c9\u03c2 396 2eV, \u03b7 \u03bf\u03c0\u03bf\u03af\u03b1 \u03b1\u03bd\u03c4\u03b9\u03c3\u03c4\u03bf\u03b9\u03c7\u03b5\u03af \u03ba\u03b1\u03bb\u03ac \u03bc\u03b5 \u03c4\u03b1 \u03c0\u03b5\u03b9\u03c1\u03b1\u03bc\u03b1\u03c4\u03b9\u03ba\u03ac \u03b4\u03b5\u03b4\u03bf\u03bc\u03ad\u03bd\u03b1.<\/p>\n

\u03a4\u03bf \u03c5\u03bb\u03b9\u03ba\u03cc \u03bd\u03b9\u03c4\u03c1\u03b9\u03b4\u03af\u03bf\u03c5 \u03c4\u03bf\u03c5 \u03b1\u03bb\u03bf\u03c5\u03bc\u03b9\u03bd\u03af\u03bf\u03c5 Shapal Hi M Soft \u03c4\u03b7\u03c2 Tokuyama \u03c0\u03c1\u03bf\u03c3\u03c6\u03ad\u03c1\u03b5\u03b9 \u03b1\u03bd\u03ce\u03c4\u03b5\u03c1\u03b7 \u03ba\u03b1\u03c4\u03b5\u03c1\u03b3\u03b1\u03c3\u03b9\u03bc\u03cc\u03c4\u03b7\u03c4\u03b1 \u03ba\u03b1\u03b9 \u03bc\u03b7\u03c7\u03b1\u03bd\u03b9\u03ba\u03ae \u03b1\u03bd\u03c4\u03bf\u03c7\u03ae, \u03ba\u03b1\u03c4\u03b1\u03c3\u03ba\u03b5\u03c5\u03b1\u03c3\u03bc\u03ad\u03bd\u03bf \u03bc\u03ad\u03c3\u03c9 \u03bc\u03b9\u03b1\u03c2 \u03bc\u03bf\u03bd\u03b1\u03b4\u03b9\u03ba\u03ae\u03c2 \u03b4\u03b9\u03b1\u03b4\u03b9\u03ba\u03b1\u03c3\u03af\u03b1\u03c2 \u03c0\u03bf\u03c5 \u03c0\u03c1\u03bf\u03c3\u03b8\u03ad\u03c4\u03b5\u03b9 \u03bd\u03b9\u03c4\u03c1\u03af\u03b4\u03b9\u03bf \u03b2\u03bf\u03c1\u03af\u03bf\u03c5 \u03b3\u03b9\u03b1 \u03b1\u03c5\u03be\u03b7\u03bc\u03ad\u03bd\u03b7 \u03c3\u03ba\u03bb\u03b7\u03c1\u03cc\u03c4\u03b7\u03c4\u03b1 - \u03b9\u03b4\u03b1\u03bd\u03b9\u03ba\u03cc \u03b3\u03b9\u03b1 \u03bc\u03b5\u03b3\u03ac\u03bb\u03b7 \u03c0\u03bf\u03b9\u03ba\u03b9\u03bb\u03af\u03b1 \u03b5\u03c6\u03b1\u03c1\u03bc\u03bf\u03b3\u03ce\u03bd.<\/p>\n

\"\u03bd\u03b9\u03c4\u03c1\u03af\u03b4\u03b9\u03bf<\/p>","protected":false},"excerpt":{"rendered":"

Aluminum Nitride and Aluminum Nitride Aluminum Nitride (AlN) is an ideal material to use in thermal applications. With high thermal […]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_seopress_robots_primary_cat":"none","_seopress_titles_title":"","_seopress_titles_desc":"","_seopress_robots_index":"","site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[2],"tags":[],"class_list":["post-14","post","type-post","status-publish","format-standard","hentry","category-products-related"],"_links":{"self":[{"href":"https:\/\/aluminiumnitride.com\/el\/wp-json\/wp\/v2\/posts\/14","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/aluminiumnitride.com\/el\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/aluminiumnitride.com\/el\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/aluminiumnitride.com\/el\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/aluminiumnitride.com\/el\/wp-json\/wp\/v2\/comments?post=14"}],"version-history":[{"count":3,"href":"https:\/\/aluminiumnitride.com\/el\/wp-json\/wp\/v2\/posts\/14\/revisions"}],"predecessor-version":[{"id":29,"href":"https:\/\/aluminiumnitride.com\/el\/wp-json\/wp\/v2\/posts\/14\/revisions\/29"}],"wp:attachment":[{"href":"https:\/\/aluminiumnitride.com\/el\/wp-json\/wp\/v2\/media?parent=14"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/aluminiumnitride.com\/el\/wp-json\/wp\/v2\/categories?post=14"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/aluminiumnitride.com\/el\/wp-json\/wp\/v2\/tags?post=14"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}