{"id":14,"date":"2024-09-15T18:25:01","date_gmt":"2024-09-15T10:25:01","guid":{"rendered":"https:\/\/aluminiumnitride.com\/?p=14"},"modified":"2024-12-21T20:17:57","modified_gmt":"2024-12-21T12:17:57","slug":"nitrid-hliniku","status":"publish","type":"post","link":"https:\/\/aluminiumnitride.com\/cs\/nitrid-hliniku\/","title":{"rendered":"nitrid hlin\u00edku"},"content":{"rendered":"

Nitrid hlin\u00edku a nitrid hlin\u00edku<\/h1>\n

Nitrid hlin\u00edku (AlN) je ide\u00e1ln\u00ed materi\u00e1l pro pou\u017eit\u00ed v tepeln\u00fdch aplikac\u00edch. D\u00edky vysok\u00e9 tepeln\u00e9 vodivosti, izola\u010dn\u00edm vlastnostem a n\u00edzk\u00e9mu koeficientu tepeln\u00e9 rozta\u017enosti je AlN atraktivn\u00ed volbou materi\u00e1lu, kter\u00fd je bezpe\u010dnou alternativou oxidu berylia v aplikac\u00edch polovodi\u010dov\u00e9ho pr\u016fmyslu a snadno se obr\u00e1b\u00ed.<\/p>\n

AlN lze obr\u00e1b\u011bt v zelen\u00e9m, biskvitov\u00e9m nebo pln\u011b slinut\u00e9m stavu pro obr\u00e1b\u011bn\u00ed. Pln\u011b slinut\u00fd materi\u00e1l v\u0161ak vy\u017eaduje v\u00edce \u010dasu a dovednost\u00ed, aby byly dodr\u017eeny p\u0159\u00edsn\u00e9 tolerance.<\/p>\n

Vysok\u00e1 tepeln\u00e1 vodivost<\/h2>\n

Vynikaj\u00edc\u00ed tepeln\u00e1 vodivost nitridu hlin\u00edku z n\u011bj \u010din\u00ed vynikaj\u00edc\u00ed materi\u00e1l pro odvod tepla v elektronick\u00fdch za\u0159\u00edzen\u00edch. Modern\u00ed elektronika produkuje velk\u00e9 mno\u017estv\u00ed tepla, kter\u00e9 mus\u00ed b\u00fdt rychle odv\u00e1d\u011bno; izola\u010dn\u00ed vlastnosti nitridu hlin\u00edku pom\u00e1haj\u00ed zajistit, aby nedoch\u00e1zelo k p\u0159eh\u0159\u00edv\u00e1n\u00ed, co\u017e zvy\u0161uje spolehlivost v \u010dase a prodlu\u017euje \u017eivotnost sou\u010d\u00e1stek.<\/p>\n

AlN m\u00e1 hustotu 3,26 g\/cm3 a extr\u00e9mn\u011b vysokou tepelnou vodivost 170 W\/(m-K), co\u017e je v\u00edce ne\u017e p\u011btkr\u00e1t v\u00edce ne\u017e u oxidu hlinit\u00e9ho a bl\u00ed\u017e\u00ed se tepeln\u00e9 vodivosti berylia. Tepelnou vodivost AlN v\u0161ak bohu\u017eel mohou sni\u017eovat kysl\u00edkov\u00e9 ne\u010distoty p\u0159\u00edtomn\u00e9 ve v\u00fdchoz\u00edch pr\u00e1\u0161c\u00edch b\u011bhem sp\u00e9k\u00e1n\u00ed.<\/p>\n

Pro zlep\u0161en\u00ed tepeln\u00e9 vodivosti se pr\u00e1\u0161ek m\u00eds\u00ed s pomocn\u00fdmi sp\u00e9kac\u00edmi l\u00e1tkami, jako jsou CaO a Y2O3. \u010c\u00e1stice se pot\u00e9 rozemelou na ultrajemnou velikost pomoc\u00ed vysoce v\u00fdkonn\u00e9ho ml\u00fdna, co\u017e umo\u017e\u0148uje vytvo\u0159it t\u011bsn\u011bj\u0161\u00ed keramick\u00e9 struktury. Vznikaj\u00ed tak hust\u00e9 keramick\u00e9 struktury s vynikaj\u00edc\u00edmi tepeln\u011b izola\u010dn\u00edmi vlastnostmi.<\/p>\n

Vynikaj\u00edc\u00ed tepeln\u00e1 a elektrick\u00e1 izolace nitridu hlin\u00edku z n\u011bj \u010din\u00ed vynikaj\u00edc\u00ed materi\u00e1l pro aplikace MEMS, v\u010detn\u011b vysokofrekven\u010dn\u00edch filtr\u016f, sb\u011bra\u010d\u016f energie a ultrazvukov\u00fdch p\u0159evodn\u00edk\u016f. Krom\u011b toho je tento materi\u00e1l d\u00edky sv\u00e9 \u0161irok\u00e9 p\u00e1sov\u00e9 meze\u0159e, kompatibilit\u011b s technologi\u00ed komplement\u00e1rn\u00edch polovodi\u010d\u016f na b\u00e1zi oxid\u016f kov\u016f (CMOS) a vynikaj\u00edc\u00edm piezoelektrick\u00fdm vlastnostem vhodn\u00fd pro mnoho za\u0159\u00edzen\u00ed MEMS, jako jsou vysokofrekven\u010dn\u00ed filtry, sb\u011bra\u010de energie a ultrazvukov\u00e9 p\u0159evodn\u00edky. Jeho mechanick\u00e9 vlastnosti nav\u00edc umo\u017e\u0148uj\u00ed snadn\u00e9 tvarov\u00e1n\u00ed.<\/p>\n

Vysok\u00e1 elektrick\u00e1 izolace<\/h2>\n

Nitrid hlin\u00edku je netoxick\u00fd keramick\u00fd materi\u00e1l s vynikaj\u00edc\u00ed tepelnou vodivost\u00ed, elektrickou izolac\u00ed a n\u00edzkou rozta\u017enost\u00ed - ide\u00e1ln\u00ed pro velkoplo\u0161n\u00e9 substr\u00e1ty pro odvod tepla z integrovan\u00fdch obvod\u016f a obalov\u00e9 aplikace. Tento netoxick\u00fd materi\u00e1l nav\u00edc odol\u00e1v\u00e1 plazmov\u00e9 erozi a chemick\u00e9 korozi a lze jej snadno metalizovat, pokovovat, p\u00e1jit nebo natavovat - nav\u00edc jeho vazby Al-N poskytuj\u00ed v\u00fdjime\u010dnou odolnost proti korozi, oxidaci a \u00fanav\u011b.<\/p>\n

Keramika m\u00e1 vy\u0161\u0161\u00ed tepelnou vodivost a hustotu ne\u017e jej\u00ed prot\u011bj\u0161ky z oxidu hlinit\u00e9ho a beryllia, p\u0159i\u010dem\u017e se m\u016f\u017ee pochlubit ni\u017e\u0161\u00edm koeficientem rozta\u017enosti ne\u017e oxid hlinit\u00fd pro aplikace p\u0159i vy\u0161\u0161\u00edch teplot\u00e1ch a vy\u0161\u0161\u00ed odolnost\u00ed proti plazmov\u00e9 erozi ne\u017e v\u011bt\u0161ina kov\u016f.<\/p>\n

Nitrid hlin\u00edku je v elektronick\u00fdch aplikac\u00edch atraktivn\u00ed volbou d\u00edky sv\u00e9 n\u00edzk\u00e9 tepeln\u00e9 rozta\u017enosti a vynikaj\u00edc\u00edm elektroizola\u010dn\u00edm vlastnostem, co\u017e v n\u011bkter\u00fdch p\u0159\u00edpadech p\u0159edstavuje alternativu k berylliu. D\u00edky ni\u017e\u0161\u00ed hustot\u011b a elektrick\u00fdm vlastnostem je nitrid hlin\u00edku obzvl\u00e1\u0161t\u011b vhodn\u00fdm materi\u00e1lem pro sou\u010d\u00e1stky vy\u017eaduj\u00edc\u00ed p\u0159\u00edsn\u00e9 tolerance, jako jsou nap\u0159\u00edklad radiofrekven\u010dn\u00ed sou\u010d\u00e1stky.<\/p>\n

Nitrid hlin\u00edku (AlN) je atraktivn\u00edm materi\u00e1lem pro aplikace v mikroelektromechanick\u00fdch syst\u00e9mech (MEMS), jako jsou vysokofrekven\u010dn\u00ed filtry a sb\u011bra\u010de energie, proto\u017ee se vyzna\u010duje \u0161irok\u00fdmi p\u00e1smov\u00fdmi mezerami a piezoelektrick\u00fdmi vlastnostmi kompatibiln\u00edmi s technologi\u00ed komplement\u00e1rn\u00edch polovodi\u010d\u016f na b\u00e1zi oxid\u016f kov\u016f (CMOS). Krom\u011b toho lze AlN d\u00edky n\u00edzk\u00e9mu bodu t\u00e1n\u00ed snadno opracov\u00e1vat. Jeho smr\u0161\u0165ov\u00e1n\u00ed po sp\u00e9k\u00e1n\u00ed v\u0161ak m\u016f\u017ee b\u00fdt n\u00e1ro\u010dn\u00e9 p\u0159i dodr\u017eov\u00e1n\u00ed p\u0159\u00edsn\u00fdch toleranc\u00ed u tohoto materi\u00e1lu.<\/p>\n

Vysok\u00e1 mechanick\u00e1 pevnost<\/h2>\n

Nitrid hlin\u00edku se vyzna\u010duje mimo\u0159\u00e1dnou mechanickou pevnost\u00ed, co\u017e z n\u011bj \u010din\u00ed vynikaj\u00edc\u00ed materi\u00e1l pro v\u00fdrobu keramick\u00fdch substr\u00e1t\u016f pro polovodi\u010de. Je jedn\u00edm z nejpevn\u011bj\u0161\u00edch keramick\u00fdch materi\u00e1l\u016f pou\u017e\u00edvan\u00fdch v sou\u010dasnosti - m\u00e1 vy\u0161\u0161\u00ed pevnost v ohybu ne\u017e karbid k\u0159em\u00edku i oxid hlinit\u00fd - a d\u00edky sv\u00fdm vynikaj\u00edc\u00edm tepeln\u011b vodiv\u00fdm vlastnostem nab\u00edz\u00ed tak\u00e9 vynikaj\u00edc\u00ed elektroizola\u010dn\u00ed vlastnosti.<\/p>\n

Jedine\u010dn\u00e1 kombinace vlastnost\u00ed nitridu hlin\u00edku je ide\u00e1ln\u00ed pro aplikace v energetice a mikroelektronice a \u010dasto slou\u017e\u00ed jako alternativa k oxidu berylnat\u00e9mu v elektronice kv\u016fli zdravotn\u00edm rizik\u016fm spojen\u00fdm s manipulac\u00ed s BeO. Krom\u011b toho se nitrid hlin\u00edku m\u016f\u017ee pochlubit mnohem ni\u017e\u0161\u00edm koeficientem tepeln\u00e9 rozta\u017enosti ve srovn\u00e1n\u00ed s oxidem hlinit\u00fdm i oxidem berylnat\u00fdm, tak\u017ee se hod\u00ed pro aplikace vy\u017eaduj\u00edc\u00ed provoz p\u0159i n\u00edzk\u00fdch teplot\u00e1ch.<\/p>\n

Ned\u00e1vn\u00fd pokrok v technologii v\u00fdkonov\u00fdch polovodi\u010d\u016f vyvolal zv\u00fd\u0161enou pot\u0159ebu alternativn\u00edch materi\u00e1l\u016f, kter\u00e9 mohou \u00fa\u010dinn\u011b odv\u00e1d\u011bt teplo. Tradi\u010dn\u00ed keramick\u00e9 substr\u00e1tov\u00e9 materi\u00e1ly, v\u010detn\u011b oxidu hlinit\u00e9ho (Al2O3) a nitridu k\u0159em\u00edku (Si3N4), se v tomto ohledu uk\u00e1zaly jako nedostate\u010dn\u00e9, a proto se AlGalN objevil jako potenci\u00e1ln\u00ed kandid\u00e1t d\u00edky sv\u00e9 vynikaj\u00edc\u00ed tepeln\u00e9 vodivosti.<\/p>\n

P\u0159echod z oxidu hlinit\u00e9ho na AlGalN bohu\u017eel u n\u011bkter\u00fdch v\u00fdrobc\u016f vy\u017eaduje rozs\u00e1hl\u00e9 obr\u00e1b\u011bn\u00ed v dus\u00edkov\u00e9 atmosf\u00e9\u0159e s dlouh\u00fdmi dodac\u00edmi lh\u016ftami. Aby pomohly tuto p\u0159ek\u00e1\u017eku p\u0159ekonat, vyvinuly n\u011bkter\u00e9 spole\u010dnosti obrobiteln\u00e9 v\u00fdrobky z AlN vyr\u00e1b\u011bn\u00e9 jako p\u0159edvalky, kter\u00e9 lze obr\u00e1b\u011bt bez pou\u017eit\u00ed diamantov\u00fdch n\u00e1stroj\u016f a jsou cenov\u011b v\u00fdhodn\u011bj\u0161\u00ed ne\u017e \u010dist\u00fd AlN. Tyto obrobiteln\u00e9 v\u00fdrobky lze tak\u00e9 z\u00edskat od v\u00edce dodavatel\u016f, co\u017e je\u0161t\u011b v\u00edce zkracuje dodac\u00ed lh\u016fty.<\/p>\n

Vysok\u00e1 odolnost proti oxidaci<\/h2>\n

Nitrid hlin\u00edku (AlN) je pevn\u00fd nitrid hlin\u00edku s vysokou tepelnou vodivost\u00ed a vynikaj\u00edc\u00edmi elektroizola\u010dn\u00edmi vlastnostmi. Odolnost AlN v\u016f\u010di oxidaci, od\u011bru a korozi jej nav\u00edc chr\u00e1n\u00ed p\u0159ed po\u0161kozen\u00edm p\u0159i taven\u00ed hlin\u00edku i p\u0159ed koroz\u00ed arsenidu galia; nav\u00edc je netoxick\u00fd.<\/p>\n

Atmosf\u00e9rick\u00fd plast je ide\u00e1ln\u00edm materi\u00e1lem pro aplikace v n\u00e1ro\u010dn\u00fdch podm\u00ednk\u00e1ch, proto\u017ee odol\u00e1v\u00e1 vysok\u00fdm teplot\u00e1m a chemick\u00e9mu ot\u011bru, tak\u017ee je ide\u00e1ln\u00edm materi\u00e1lem, kter\u00fd odol\u00e1v\u00e1 vibrac\u00edm a nam\u00e1h\u00e1n\u00ed a z\u00e1rove\u0148 z\u016fst\u00e1v\u00e1 elektricky vodiv\u00fd a odoln\u00fd v\u016f\u010di UV z\u00e1\u0159en\u00ed. Krom\u011b toho snese i vysok\u00e9 nap\u011bt\u00ed, zat\u00edmco d\u00edky sv\u00e9 mechanick\u00e9 pevnosti je vhodn\u00fd i pro odol\u00e1v\u00e1n\u00ed vibrac\u00edm a nam\u00e1h\u00e1n\u00ed. A kone\u010dn\u011b, elektrick\u00e1 vodivost a odolnost v\u016f\u010di UV z\u00e1\u0159en\u00ed \u010din\u00ed z tohoto plastu vynikaj\u00edc\u00ed materi\u00e1l.<\/p>\n

Tento materi\u00e1l lze obr\u00e1b\u011bt b\u011b\u017en\u00fdmi obr\u00e1b\u011bc\u00edmi n\u00e1stroji a nab\u00edz\u00ed vynikaj\u00edc\u00ed mechanickou pevnost a obrobitelnost. Nav\u00edc je d\u00edky sv\u00e9 n\u00edzk\u00e9 hustot\u011b vhodn\u00fd pro lehk\u00e9 sou\u010d\u00e1stky a leteck\u00e9 subsyst\u00e9my, p\u0159i\u010dem\u017e je odoln\u011bj\u0161\u00ed ne\u017e obecn\u00fd hlin\u00edk FR-4 nebo m\u011bd\u00ed zalit\u00e9 desky plo\u0161n\u00fdch spoj\u016f.<\/p>\n

K charakterizaci vzork\u016f S1 a S4 AlN\/Si s r\u016fznou tlou\u0161\u0165kou vrstvy pomoc\u00ed sondy XPS byl pou\u017eit Woollam\u016fv spektroskopick\u00fd elipsometr s prom\u011bnn\u00fdm \u00fahlem (Lincoln, NE USA), p\u0159i\u010dem\u017e vazebn\u00e1 energie fotoelektronov\u00e9ho p\u00edku N 1s byla nam\u011b\u0159ena 396 2eV, co\u017e dob\u0159e odpov\u00edd\u00e1 experiment\u00e1ln\u00edm \u00fadaj\u016fm.<\/p>\n

Materi\u00e1l Shapal Hi M Soft od spole\u010dnosti Tokuyama z nitridu hlin\u00edku nab\u00edz\u00ed vynikaj\u00edc\u00ed obrobitelnost a mechanickou pevnost a je vyr\u00e1b\u011bn jedine\u010dn\u00fdm procesem, kter\u00fd p\u0159id\u00e1v\u00e1 nitrid b\u00f3ru pro zv\u00fd\u0161en\u00ed tvrdosti - ide\u00e1ln\u00ed pro \u0161irokou \u0161k\u00e1lu aplikac\u00ed.<\/p>\n

\"nitrid<\/p>","protected":false},"excerpt":{"rendered":"

Aluminum Nitride and Aluminum Nitride Aluminum Nitride (AlN) is an ideal material to use in thermal applications. With high thermal […]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_seopress_robots_primary_cat":"none","_seopress_titles_title":"","_seopress_titles_desc":"","_seopress_robots_index":"","site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[2],"tags":[],"class_list":["post-14","post","type-post","status-publish","format-standard","hentry","category-products-related"],"_links":{"self":[{"href":"https:\/\/aluminiumnitride.com\/cs\/wp-json\/wp\/v2\/posts\/14","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/aluminiumnitride.com\/cs\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/aluminiumnitride.com\/cs\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/aluminiumnitride.com\/cs\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/aluminiumnitride.com\/cs\/wp-json\/wp\/v2\/comments?post=14"}],"version-history":[{"count":3,"href":"https:\/\/aluminiumnitride.com\/cs\/wp-json\/wp\/v2\/posts\/14\/revisions"}],"predecessor-version":[{"id":29,"href":"https:\/\/aluminiumnitride.com\/cs\/wp-json\/wp\/v2\/posts\/14\/revisions\/29"}],"wp:attachment":[{"href":"https:\/\/aluminiumnitride.com\/cs\/wp-json\/wp\/v2\/media?parent=14"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/aluminiumnitride.com\/cs\/wp-json\/wp\/v2\/categories?post=14"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/aluminiumnitride.com\/cs\/wp-json\/wp\/v2\/tags?post=14"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}